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Change in polarity of zinc oxide films grown on sapphire substrates without insertion of any buffer layer

Published online by Cambridge University Press:  31 January 2011

Yutaka Adachi ,
Naoki Ohashi ,
Tsuyoshi Ohnishi ,
Takeshi Ohgaki ,
Isao Sakaguchi ,
Hajime Haneda  and
Mikk Lippmaa
Yutaka Adachi*
Affiliation:
National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan
Naoki Ohashi
Affiliation:
National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan
Tsuyoshi Ohnishi
Affiliation:
National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan
Takeshi Ohgaki
Affiliation:
National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan
Isao Sakaguchi
Affiliation:
National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan
Hajime Haneda
Affiliation:
National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan
Mikk Lippmaa
Affiliation:
Institute of Solid State Physics, The University of Tokyo, Kashiwa, Chiba 277-8581, Japan
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

We have investigated the polarity of zinc oxide (ZnO) and Al-doped ZnO films grown on (11¯20) and (0001) sapphire substrates, using coaxial impact collision ion scattering spectroscopy. The films grown by pulsed laser deposition with a nominally undoped ZnO ceramic target had a (000¯1) surface, whereas the films prepared with a 1 mol% Al-doped ZnO ceramic target had a (0001) surface. The usage of Al-doped and undoped targets caused no difference in the in-plane lattice orientation. Electron microscope observations revealed that polarity change due to doping occurred without the formation of any interfacial phase between ZnO and sapphire.

Keywords

EpitaxyFilmLaser Ablation
Type
Articles
Information
Journal of Materials Research , Volume 23 , Issue 12: Biomimetic and Bio-enabled Materials Science and Engineering , December 2008 , pp. 3269 - 3272
Copyright
Copyright © Materials Research Society 2008

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References

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