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SU8 ridge-gap waveguide resonator

Published online by Cambridge University Press:  12 May 2014

Sofia Rahiminejad ,
Elena Pucci ,
Sjoerd Haasl  and
Peter Enoksson
Sofia Rahiminejad*
Affiliation:
Department of Microtechnology and Nanoscience, Chalmers University of Technology, Kemivagen 9, 412 96 Gothenburg, Sweden
Elena Pucci
Affiliation:
Department of Signals and Systems, Chalmers University of Technology, Hörsalsvägen 11, 412 96 Gothenburg, Sweden
Sjoerd Haasl
Affiliation:
School of Technology and Health, Royal Institute of Technology, 14152 Stockholm, Sweden
Peter Enoksson
Affiliation:
Department of Microtechnology and Nanoscience, Chalmers University of Technology, Kemivagen 9, 412 96 Gothenburg, Sweden
*
Corresponding author: S. Rahiminejad Email: [email protected]
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Abstract

In this paper, we present the first ridge-gap waveguide resonator made with a polymer base. It is designed for the frequency range 220–325 GHz, and is fabricated solely using a Au coated two-layer SU8-based process. The design is based on previous work done with Si. The new process has advantages such as fewer and cheaper process steps. The SU8 ridge-gap waveguide resonator is made in order to obtain attenuation characteristics via the measured Q-factor of the resonator. The ridge-gap waveguide resonator has the same dimensions as the previous one fabricated in Si, and the same thickness of the Au coating. The SU8-based resonator shows an attenuation loss of 0.41 dB/mm at 282.2 GHz compared to the Si-based resonator with an attenuation loss of 0.043 dB/mm at 283.5 GHz. This makes the SU8 process a more cost-effective alternative to the Si process

Keywords

RF-MEMS and MOEMSNew and emerging technologies and materials
Type
Research Papers
Information
International Journal of Microwave and Wireless Technologies , Volume 6 , Issue 5: MEMSWAVE Symposium 2013 , October 2014 , pp. 459 - 465
Copyright
Copyright © Cambridge University Press and the European Microwave Association 2014 

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References

REFERENCES

[1]Shang, X.; Ke, M.; Wang, Y.; Lancaster, M.J.: WR-3 and waveguides and filters fabricated using SU8 photoresist micromachining technology. IEEE Transact. Terahertz Sci. Technol., 2 (2012), 629–637.Google Scholar
[2]Silveirinha, M.G.; Fernandes, C.A.; Costa, J.R.: Electromagnetic characterization of textured surfaces formed by metallic pins. IEEE Transact. Antennas Propag., 56 (2008), 405–415.Google Scholar
[3]Rajo-Iglesias, E.; Kildal, P.-S.: Numerical studies of bandwidth of parallel-plate cut-off realised by a bed of nails, corrugations and mushroom-type electromagnetic bandgap for use in gap waveguides. IET Microw. Antennas Propag., 5 (2011), 282–289.Google Scholar
[4]Kildal, P.-S.; Alfonso, E.; Valero-Nogueira, A.; Rajo-Iglesias, E.: Local metamaterial-based waveguides in gaps between parallel metal plates. IEEE Antennas Wirel. Propag. Lett., 8 (2009), 84–87.Google Scholar
[5]Kildal, P.-S.; Zaman, A.U.; Rajo-Iglesias, E.; Alfonso, E.; Valero-Nogueira, A.: Design and experimental verification of ridge gap waveguide in bed of nails for parallel-plate mode suppression. IET Microw. Antennas Propag., 5 (2011), 262–270.Google Scholar
[6]Zaman, A.U.; Kildal, P-S.; Kishk, A.A.: Narrow-band microwave filter using high-Q groove gap waveguide resonators with manufacturing flexibility and no sidewalls. IEEE Transact. Compon. Packag. Manuf. Technol., 2 (2012), 1882–1889.Google Scholar
[7]Zaman, A.U.; Alexanderson, M.; Vukusic, T.; Kildal, P.-S.: Gap waveguide PMC packaging for improved isolation of circuit components in high frequency microwave modules. IEEE Transact. Compon. Packag. Manuf. Technol., 4 (2013), 16–25.CrossRefGoogle Scholar
[8]Rahiminejad, S. et al. Micromachined ridge gap waveguide and resonator for millimeter-wave applications. Sens. Actuators A Phys., 186 (2012), 264–269.Google Scholar
[9]Rahiminejad, S.; Pucci, E.; Haasl, S.; Enoksson, P.: Contactless pin-flange adapter for high-frequency measurements, 23rd Micromechanics and Microsystems Europe Workshop, Ilmenau, Germany, 2012.Google Scholar
[10]Rahiminejad, S.; Pucci, E.; Haasl, S.; Enoksson, P.: Micromachined double-sided SOI pin-flange adapter for 100 GHz, 24th Micromechanics And Microsystems Europe Workshop, Espoo, Finland, 2013.CrossRefGoogle Scholar
[11]Rahiminejad, S.; Raza, H.; Zaman, A.U.; Haasl, S.; Enoksson, P.; Kildal, P.-S.: Micromachined gap waveguides for 100 GHz applications, In 7th European Conf. Antennas and Propagation (EuCAP), Gothenburg, Sweden, 2013.Google Scholar
[12]Rahiminejad, S. et al. 100 GHz SOI gap waveguides, In The 17th Int. Conf. Solid-State Sensors, Actuators and Microsystems, Barcelona, Spain, 2013.Google Scholar
[13]Chollet, F.: Welcome to MEMScyclopedia.org!, 18 Nov. 2013, http://memscyclopedia.org/su8.html.Google Scholar
[14]Pucci, E.; Rajo-Iglesias, E.; Kildal, P.-S.: New microstrip gap waveguide on mushroom-type EBG for packaging of microwave components. IEEE Microw. Wirel. Compon. Lett., 22 (2012), 129–131.CrossRefGoogle Scholar
[15]Pucci, E.; Zaman, A.U.; Rajo-Iglesias, E.; Kildal, P.-S.; Kishk, A.: Study of Q-factors of ridge and groove gap waveguide resonators. IET Microw. Antennas Propag., 7 (2013), 900–908.Google Scholar