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Low loss, fully-printed, ferroelectric varactors for high-power impedance matching at low ISM band frequency

Published online by Cambridge University Press:  23 May 2019

Daniel Kienemund ,
Nicole Bohn ,
Thomas Fink ,
Mike Abrecht ,
Walter Bigler ,
Joachim R. Binder ,
Rolf Jakoby  and
Holger Maune
Daniel Kienemund*
Affiliation:
Institut für Mikrowellentechnik und Photonik, Technische Universität Darmstadt, Darmstadt, Germany;
Nicole Bohn
Affiliation:
Institute for Applied Materials, Karlsruhe Institute of Technology, Eggenstein-Leopoldshafen, Germany
Thomas Fink
Affiliation:
COMET AG, Flamatt, Switzerland
Mike Abrecht
Affiliation:
COMET AG, Flamatt, Switzerland
Walter Bigler
Affiliation:
COMET AG, Flamatt, Switzerland
Joachim R. Binder
Affiliation:
Institute for Applied Materials, Karlsruhe Institute of Technology, Eggenstein-Leopoldshafen, Germany
Rolf Jakoby
Affiliation:
Institut für Mikrowellentechnik und Photonik, Technische Universität Darmstadt, Darmstadt, Germany;
Holger Maune
Affiliation:
Institut für Mikrowellentechnik und Photonik, Technische Universität Darmstadt, Darmstadt, Germany;
*
Author for correspondence: Daniel Kienemund E-mail: [email protected]
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Abstract

Low loss, ferroelectric, fully-printed varactors for high-power matching applications are presented. Piezoelectric-induced acoustic resonances reduce the power handling capabilities of these varactors by lowering the Q-factor at the operational frequency of 13.56 MHz. Here, a quality factor of maximum 142 is achieved with an interference-based acoustic suppression approach utilizing double metal–insulator–metal structures. The varactors show a tunability of maximum 34% at 300 W of input power. At a power level of 1 kW, the acoustic suppression technique greatly reduces the dissipated power by 62% from 37 W of a previous design to 14.2 W. At this power level, the varactors remain tunable with maximum 18.2% and 200 V of biasing voltage.

Keywords

High powertunablefully-printedISM band
Type
EuMW 2018
Information
International Journal of Microwave and Wireless Technologies , Volume 11 , Special Issue 7: MIKON 2018 / EuMW 2018 (Part II) , September 2019 , pp. 658 - 665
Copyright
Copyright © Cambridge University Press and the European Microwave Association 2019 

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References

1Goodyear, A and Cooke, M (2017) Atomic layer etching in close to conventional plasma etch tools. Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films 35, 01A105-1-01A105-4.Google Scholar
2Johnson, NR, Sun, H, Sharma, K and George, SM (2016) Thermal atomic layer etching of crystalline aluminum nitride using sequential, self-limiting hydrogen fluoride and Sn(acac)2 reactions and enhancement by H2 and Ar plasmas. Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films 34, 050603-1-050603-5.Google Scholar
3Sherpa, SD, Ventzek, PLG and Ranjan, A (2017) Quasiatomic layer etching of silicon nitride with independent control of directionality and selectivity. Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films 35, 05C310-1-05C310-18.Google Scholar
4Ranjan, A and Sherpa, SD (2018) New frontiers of atomic layer etching. In Engelmann, SU and Wise, RS (eds), Advanced Etch Technology for Nanopatterning VII. San Jose, California, US: SPIE. Digital Library.Google Scholar
5Preis, S, Wiens, A, Kienemund, D, Kendig, D, Maune, H, Jakoby, R, Heinrich, W and Bengtsson, O (2015) Discrete RF-power MIM BST thick-film varactors,Microwave Conference (EuMC), 2015 European, September 2015, pp. 941–944.Google Scholar
6Kienemund, D, Fink, T, Abrecht, M, Bigler, W, Binder, JR, Jakoby, R and Maune, H (2017) A fully-printed, BST MIM varactor for low ISM-band matching networks up to 1000 W,47th European Microwave Conference (EuMC), 2017.Google Scholar
7Gevorgian, S, Vorobiev, A and Lewin, T (2006) DC field and temperature dependent acoustic resonances in parallel-plate capacitors based on SrTiO3 and Ba0.25Sr0.75TiO3 films: Experiment and modeling. Journal of Applied Physics 99, 124112.Google Scholar
8Tappe, S, Böttger, U and Waser, R (2004) Electrostrictive resonances in Ba0.7Sr0.3TiO3 thin filmsat microwave frequencies. Applied Physics Letters 85, 624–626.Google Scholar
9Kienemund, D, Walk, D, Bohn, N, Binder, JR, Jakoby, R and Maune, H (2018) Suppression of acoustic resonances in fully-printed, BST thick film varactors utilizing double MIM structures,48th European Microwave Conference (EuMC). IEEE, September 2018.Google Scholar
10Lakin, KM, Kline, GR and McCarron, KT (1993) High-Q microwave acoustic resonators and filters. IEEE Transactions on Microwave Theory and Techniques 41, 2139–2146.Google Scholar
11Zheng, Y (2013) Tunable multiband ferroelectric devices for reconfigurable RF-frontends. ser. Lecture Notes in Electrical Engineering. Berlin, Heidelberg: Springer.Google Scholar
12Newnham, RE (2004) Properties of Materials: Anisotropy, Symmetry, Structure. Oxford: OUP.Google Scholar
13Zheng, Y (2013) Tunable multiband ferroelectric devices. In Lecture Notes in Electrical Engineering. Berlin, Heidelberg: Springer, pp. 55–136.Google Scholar
14Kohler, C, Nikfalazar, M, Friederich, A, Wiens, A, Sazegar, M, Jakoby, R and Binder, JR (2015) Fully screen-printed tunable microwave components based on optimized barium strontium titanate thick films. International Journal of Applied Ceramic Technology 12, E96–E105.Google Scholar
15Oshiki, M and Fukada, E (1975) Inverse piezoelectric effect and electrostrictive effect in polarized poly(vinylidene fluoride) films. Journal of Materials Science 10, 1–6.Google Scholar
16Li, F, Jin, L, Xu, Z and Zhang, S (2014) Electrostrictive effect in ferroelectrics: an alternative approach to improve piezoelectricity. Applied Physics Reviews. 1, 011103-1-011103-20.Google Scholar
17Gevorgian, S (2009) Ferroelectrics in Microwave Devices, Circuits and Systems: Physics, Modeling, Fabrication and Measurements, ser. Engineering Materials and Processes. London: Springer.Google Scholar
18Zhou, X, Geßwein, H, Sazegar, M, Giere, A, Paul, F, Jakoby, R, Binder, JR and Haußelt, J (2010) Characterization of metal (Fe, Co, Ni, Cu) and fluorine codoped barium strontium titanate thick-films for microwave applications. Journal of Electroceramics 4, 345–354.Google Scholar
19Kienemund, D, Bohn, N, Fink, T, Abrecht, M, Bigler, W, Binder, JR, Jakoby, R and Maune, H (2018) Acoustical behavior of fully-printed, BST MIM varactor modules in high power matching circuits,IEEE/MTT-S International Microwave Symposium – IMS. IEEE, June 2018.Google Scholar
20Fink, H, Gentsch, D, Heil, B, Humpert, C and Schnettler, A (2007) Conditioning of series vacuum interrupters (VIs) for medium voltage by applying high-frequency (HF) current to increase the dielectric strength of VIs. IEEE Transactions on Plasma Science 35, 873–878.Google Scholar
21Yang, H, Geng, Y, Liu, Z, Zai, X and Wang, C (2012) A high efficiency conditioning method of vacuum interrupters by high frequency voltage impulses, 25th International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV). IEEE, September 2012.Google Scholar
22Faircloth, DC (2014) Technological aspects: high voltage.Google Scholar
23Budde, M and Kurrat, M (2006) Dielectric investigations on micro discharge currents and conditioning behaviour of vacuum gaps,International Symposium on Discharges and Electrical Insulation in Vacuum. IEEE, 2006.Google Scholar
24Küchler, A (2009) Hochspannungstechnik. Berlin, Heidelberg: Springer.Google Scholar
25Okubo, H, Hayakawa, N and Matsushita, A (2002) The relationship between partial discharge current pulse waveforms and physical mechanisms. IEEE Electrical Insulation Magazine 18, 38–45.Google Scholar