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A 20 GHz microwave heater for digital microfluidic

Published online by Cambridge University Press:  05 June 2017

Tomislav Markovic ,
Song Liu ,
Ilja Ocket  and
Bart K. J. C. Nauwelaers
Tomislav Markovic*
Affiliation:
KU Leuven, Div. ESAT-TELEMIC, Kasteelpark Arenberg 10, 3001 Leuven, Belgium
Song Liu
Affiliation:
RDA Micro, Bibo Road 690, New Pudong District, Shanghai, China
Ilja Ocket
Affiliation:
KU Leuven, Div. ESAT-TELEMIC, Kasteelpark Arenberg 10, 3001 Leuven, Belgium imec, PERSYSBE-MMWAVE, Kapeldreef 75, 3001 Leuven (Heverlee), Belgium
Bart K. J. C. Nauwelaers
Affiliation:
KU Leuven, Div. ESAT-TELEMIC, Kasteelpark Arenberg 10, 3001 Leuven, Belgium
*
Corresponding author: T. Markovic Email: [email protected]
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Abstract

This paper reports on a microwave heater at 20 GHz for digital microfluidics. It allows rapid heating of nanoliter fluid samples and simultaneous temperature monitoring by correlating the reflection coefficient of the heater with the temperature dependency of the relative permittivity of the lossy fluid under consideration, in this case demineralized water. Microwave heating was performed with power levels of 20 and 23 dBm at the on-wafer probe tips on samples of 500 nL. Temperature measurements were carried out with a miniaturized type K thermocouple, and a platinum resistor to monitor the reference temperature. Microwave and thermal performances have been characterized using multi-physics software, and measurements obtained with a large signal vector network analyzer showed good agreement with simulated data. An average heating rate of 20 °C/s was observed during the first 4 s of the heating process.

Keywords

Biomedical applicationsPassive components and circuits
Type
Research Papers
Information
International Journal of Microwave and Wireless Technologies , Volume 9 , Special Issue 8: Biomedical Applications of RF/Microwave and Optics Technologies , October 2017 , pp. 1591 - 1596
Copyright
Copyright © Cambridge University Press and the European Microwave Association 2017 

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References

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