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Ultra-high precision CMMs and their associated tactile or/andoptical scanning probes

Published online by Cambridge University Press:  09 October 2014

H. Nouira ,
R.H. Bergmans ,
A. Küng ,
H. Piree ,
R. Henselmans  and
H.A.M. Spaan
H. Nouira*
Affiliation:
Laboratoire Commun de Métrologie (LCM), LNE, 1 Rue Gaston Boissier, 75015 Paris, France
R.H. Bergmans
Affiliation:
VSL Dutch Metrology Institute, Thijsseweg 11, 2629JA Delft, The Netherlands
A. Küng
Affiliation:
Federal Institute of Metrology (METAS), Lindenweg 50, 3003 Bern-Wabern, Switzerland
H. Piree
Affiliation:
SMD, Federal Public Service Economy – Metrology – National Standards, Koning Albert II laan 16, 1000 Brussel, Belgium
R. Henselmans
Affiliation:
TNO, Opto-mechatronics Department, Stieltjesweg 1, 2628 CK Delft, The Netherlands
H.A.M. Spaan
Affiliation:
IBS Precision Engineering bv, Bedrijfsweg 1, 5683 CM Best, The Netherlands
*
⋆ Correspondence:[email protected]
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Abstract

Optical and tactile single scanning probes usually are used in dimensional metrologyapplications, especially for roughness, form, thickness and surface profile measurements.To perform assessments with nanometre level of accuracy, specific ultra-high precisionmachines have been developed by the National Metrology Institutes (NMIs) such as the LNE,VSL, METAS, SMD, generally in collaboration with industrials and academics partners. Suchdevelopments are not devoted only to NMIs but many industrials develop and commercializetheir own ultra-high precision machines as the IBSPE and TNO companies. All these machinesprovide optical and tactile precise measurements and cover a large domain of applicationsuch as the form’s characterization of optical lenses. In this paper the performance andcapability of ultra-high precision machines of some National Metrology Institutes (LNE,VSL, SMD and METAS) and industrials companies (TNO and IBSPE), involving together in theIND10 European EMRP project titled “Optical and tactile metrology for absolute formcharacterization”, will be detailed. Theirs probing systems and accuracies levels will beevoked. Relevant results especially for measuring optical lenses will be also presentedand discussed.

Keywords

Measuring machinechromatic confocal probetactile probeerror sourcesdimensionaland mechanical metrologyevaluation
Type
Research Article
Information
International Journal of Metrology and Quality Engineering , Volume 5 , Issue 2 , 2014 , 204
Copyright
© EDP Sciences 2014

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References

Schellekens, P., Rosielle, N., Vermeulen, H., Vermeulen, M., Wetzels, S., Pril, W., Design for precision: current status and trends, Ann. CIRP 47, 557–586 (1998) CrossRefGoogle Scholar
T.A.M. Ruijl, Ultra Precision Coordinate Measuring Machine – Design, Calibration and Error Compensation, Ph.D. Thesis, Technische Universiteit Delft, 2001, ISBN 90-6464-287-7
Becker, K., Heynacher, E., M400 – A coordinate measuring machine with 10 nm resolution, Proc. SPIE 802, 209–216 (1987) CrossRefGoogle Scholar
Weckenmann, A., Peggs, G., Hoffmann, J., Probing systems for dimensional micro- and nano-metrology, Meas. Sci. Technol. 17, 504–509 (2006) CrossRefGoogle Scholar
Widdershoven, I., Donker, R.L., Spaan, H.A.M., Realization and calibration of the “Isara 400” ultra-precision CMM, J. Phys.: Conf. Ser. 311, 012002 (2011) Google Scholar
Abbe, E., Meßapparate für Physiker, Zeitschrift Fur Instrumentenkunde 10, 446–448 (1890) Google Scholar
Vissiere, A., Nouira, H., Damak, M., Gibaru, O., David, J.M., Concept and architecture of a new apparatus for cylindrical form measurement with a nanometre level of accuracy, Meas. Sci. Technol. 23, 094014 (2012) CrossRefGoogle Scholar
Nouira, H., Salgado, J.A., El-Hayek, N., Ducourtieux, S., Delvallée, A., Anwer, N., Setup of a high-precision profilometer and comparison of tactile and optical measurements of standards, Meas. Sci. Technol. 25, 12 (2014) CrossRefGoogle Scholar
Nouira, H., El-Hayek, N., Yuan, X., Anwer, N., Characterization of the main error sources of chromatic confocal probes for dimensional measurement, Meas. Sci. Technol. 25, 14 (2014) CrossRefGoogle Scholar
R. Leach, Optical Measurement of Surface Topography (Handbook, Spring, 2011)
M. Vermeulen, High-Precision 3D-Coordinate Measuring Machine; Design and Prototype-Development, Ph.D. thesis, Technical University of Eindhoven, 1999
M.G.A. Van Veghel, R.H. Bergmans, H.J. Nieuwenkamp, Traceability of a linescale based micro-CMM, Proceedings of the Euspen international conference 2008 (Zurich, Switzerland, 2008), pp. 18–22
Mares, A.I., Bergmans, R.H., Evaluation of an optical coordinate measuring machine for measuring grated structures, Meas. Sci. Technol. 23, 094012 (2012) CrossRefGoogle Scholar
Internal report VSL “Probing behavior of the VSL F25 microCMM”, 2013
R.H. Bergmans, H.J. Nieuwenkamp, M.G.A. Van Veghel, Probing behaviour of a microCMM, Proceedings of the EUSPEN International conference (Como, Italy, 2012)
Küng, A., Meli, F., Thalmann, R., Ultraprecision micro-CMM using a low force 3D touch probe, Meas. Sci. Technol. 18, 319–327 (2007) CrossRefGoogle Scholar
A. Küng, F. Meli, Versatile probes for the METAS 3D Micro-CMM, 8th Euspen Int. Conf., Zürich, Switzerland (2008), Vol. 2, pp. 338–342
A. Küng, F. Meli, Self calibration method for 3D roughness of spheres using an ultraprecision coordinate measuring machine, Proc. 5th Euspen Int. Conf., Montpellier, France (2005), Vol. 1, pp. 193–196
F. Meli, A. Küng, Scanning performances with an ultra-precision μ-CMM, Proc. 6th Euspen Int. Conf., Baden bei Wien, Austria (2006), Vol. 1, pp. 193–196
Henselmans, R., Cacace, L.A., Kramer, G.F.Y., Rosielle, P.C.J.N., Steinbuch, M., The NANOMEFOS non-contact measurement machine for freeform optics, Precis. Eng. 35, 607–624 (2011) CrossRefGoogle Scholar
R. Henselmans, Non-contact Measurement Machine for Freeform Optics, Ph.D. Thesis, Eindhoven University of Technology, 2009
L.A. Cacace, Development of a nanometre accuracy non-contact probe for NANOMEFOS, MSc Thesis, Technische Universiteit Eindhoven, nr. DCT 2006.032, 2006
R.L. Donker, I. Widdershoven, D. Brouns, H.A.M. Spaan, Realization of Isara 400: a large measurement volume ultra-precision CMM, Proc. ASPE annual meeting (2009)