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Ultra-high precision CMMs and their associated tactile or/andoptical scanning probes

Published online by Cambridge University Press:  09 October 2014

H. Nouira ,
R.H. Bergmans ,
A. Küng ,
H. Piree ,
R. Henselmans  and
H.A.M. Spaan
H. Nouira*
Affiliation:
Laboratoire Commun de Métrologie (LCM), LNE, 1 Rue Gaston Boissier, 75015 Paris, France
R.H. Bergmans
Affiliation:
VSL Dutch Metrology Institute, Thijsseweg 11, 2629JA Delft, The Netherlands
A. Küng
Affiliation:
Federal Institute of Metrology (METAS), Lindenweg 50, 3003 Bern-Wabern, Switzerland
H. Piree
Affiliation:
SMD, Federal Public Service Economy – Metrology – National Standards, Koning Albert II laan 16, 1000 Brussel, Belgium
R. Henselmans
Affiliation:
TNO, Opto-mechatronics Department, Stieltjesweg 1, 2628 CK Delft, The Netherlands
H.A.M. Spaan
Affiliation:
IBS Precision Engineering bv, Bedrijfsweg 1, 5683 CM Best, The Netherlands
*
⋆ Correspondence:[email protected]
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Abstract

Optical and tactile single scanning probes usually are used in dimensional metrologyapplications, especially for roughness, form, thickness and surface profile measurements.To perform assessments with nanometre level of accuracy, specific ultra-high precisionmachines have been developed by the National Metrology Institutes (NMIs) such as the LNE,VSL, METAS, SMD, generally in collaboration with industrials and academics partners. Suchdevelopments are not devoted only to NMIs but many industrials develop and commercializetheir own ultra-high precision machines as the IBSPE and TNO companies. All these machinesprovide optical and tactile precise measurements and cover a large domain of applicationsuch as the form’s characterization of optical lenses. In this paper the performance andcapability of ultra-high precision machines of some National Metrology Institutes (LNE,VSL, SMD and METAS) and industrials companies (TNO and IBSPE), involving together in theIND10 European EMRP project titled “Optical and tactile metrology for absolute formcharacterization”, will be detailed. Theirs probing systems and accuracies levels will beevoked. Relevant results especially for measuring optical lenses will be also presentedand discussed.

Keywords

Measuring machinechromatic confocal probetactile probeerror sourcesdimensionaland mechanical metrologyevaluation
Type
Research Article
Information
International Journal of Metrology and Quality Engineering , Volume 5 , Issue 2 , 2014 , 204
Copyright
© EDP Sciences 2014

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