Hostname: page-component-78c5997874-j824f Total loading time: 0 Render date: 2024-11-12T22:40:22.557Z Has data issue: false hasContentIssue false
  • English
  • Français

Static temperature analysis and compensation of MEMSgyroscopes

Published online by Cambridge University Press:  06 March 2014

Q.J. Tang ,
X.J. Wang ,
Q.P. Yang  and
C.Z. Liu
Q.J. Tang
Affiliation:
MOEMS Education Ministry Key Laboratory, Tianjin University, Tianjin 300072, P.R. China School of Engineering and Design, Brunel University, Uxbridge, Middlesex UB8 3PH, UK
X.J. Wang
Affiliation:
MOEMS Education Ministry Key Laboratory, Tianjin University, Tianjin 300072, P.R. China
Q.P. Yang*
Affiliation:
School of Engineering and Design, Brunel University, Uxbridge, Middlesex UB8 3PH, UK
C.Z. Liu
Affiliation:
MOEMS Education Ministry Key Laboratory, Tianjin University, Tianjin 300072, P.R. China
*
⋆ Correspondence:[email protected]
Get access

Abstract

MEMS gyroscopes as a kind of angular rate sensor have been widely used, but theiraccuracy tends to be low in practical applications, especially under temperatureinfluence, and they generally require error compensation. Based on the analysis ofgyroscope operating principle, this paper has shown that the resonant frequency andmeasuring precision of the gyroscope are dependent on temperature and temperaturegradients. The paper has thus proposed a compensation model based on temperature andtemperature gradients. The experimental results have demonstrated that the thermal driftof zero bias can be effectively suppressed, and the accuracy can be improved by one orderof magnitude after compensation. Compared with compensation methods only based ontemperature, the new method gives significantly better performance. The new errorcompensation model has not only integrated the differences under different temperatureconditions, but also reduced the repeatability errors. It provides a theoretical basis foraccurate compensation of the gyroscope thermal error in practical applications and isapplicable to other MEMS gyroscopes.

Keywords

MEMS gyroscopetemperature gradientszero bias compensationtemperature characteristics
Type
Research Article
Information
International Journal of Metrology and Quality Engineering , Volume 4 , Issue 3 , 2013 , pp. 209 - 214
Copyright
© EDP Sciences 2014

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Pang, X., Fan, D., Teng, X., Peng, J., Realization of digital airborne opto-electronic servo-system, Opto-Electron. Eng. 34, 10–36 (2007) Google Scholar
Zhang, W., Fan, D., Zhang, Z., Li, K., Research on application of MEMS gyro to servo system for E-O stabilization and tracking devices, Opt. Precis. Eng. 14, 689–696 (2006) Google Scholar
Yang, J., Yuan, G., Xu, L., The research of testing and calibration technology based on micro-mechanical gyro, Chin. J. Sens. Actuat. 19, 2264–2267 (2006) Google Scholar
Fang, J., Li, J., Sheng, W., Improved temperature errormodel of silicon MEMS gyroscopewith inside frame driving, J. Beijing University of Aeronautics and Astronautics 32, 1277–1303 (2006) Google Scholar
U.A. Dauderstadt, P.M. Sarro, P.J. French, Temperature dependence and drift of a thermal accelerometer, International Conference on Solid Sensors and Actuators, Chicago, USA, 1997, pp. 1209–1212
Annovazzi-Lodi, V., Mechanical-thermal noise in micro-machined gyros, Microelectron. J. 30, 1227–1230 (1999) CrossRefGoogle Scholar
Man, H., Xiao, D., Wu, X., Chen, Z., Hou, Z., Research on temperature characteristic of mode frequency of silicon micro-gyroscope, Chin. J. Sens. Actuat. 22, 1117–1121 (2009) Google Scholar
Xia, G., Wang, S., Yang, B., Research and test on silicon micro-gyroscope temperature characteristics, Meas. Control Technol. 28, 9–13 (2009) Google Scholar
S. Gao, H. Liu, Micro electro mechanical system mechanics (National Defence Industrial Press, Beijing, 2008)
X. Li, T. Ono, Y. Wang, M. Esashi, Study on ultra-thin NEMS cantilevers-high yield fabrication and size effect on young’s modulus of silicon, The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, USA, 2002, pp. 427–430
Tan, Y., Yu, H., Huang, Q., Liu, T., Effect of temperature on the young’s modulus of silicon nano-films, Chin. J. Electron Devices 30, 755–758 (2007) Google Scholar
Chen, H., Zhang, R., Zhou, B., Chen, Z., Research on thermal characteristic and compensation algorithmfor MEMS gyroscope, J. Transducer Technol. 23, 24–26 (2004) Google Scholar
Luo, B., Yin, W., Jiang, M., Wu, M., Temperature grads modelling of zero bias for micro mechanical gyroscope, Electron. Opt. Control 15, 29–31 (2008) Google Scholar