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Charge State Distribution Measurement in an ECR-Discharge by VUV-Spectroscopy

Published online by Cambridge University Press:  12 April 2016

E.H. Marlinghaus
Affiliation:
Institut für Experimentalphysik AG II, Ruhr-Universität Bochum D-4630 Bochum, FRG
K. Wiesemann
Affiliation:
Institut für Experimentalphysik AG II, Ruhr-Universität Bochum D-4630 Bochum, FRG

Extract

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The charge state distribution of multiply charged Ar ions in an electron cyclotron resonance (ECR) heated microwave discharge (Bernhardi et al. 1976) was measured by means of VUV-spectroscopy in the wavelength region λ ≤ 100 nm (Marlinghaus 1984). Ion densities were computed from absolute line intensities in a modified corona model. Assuming electron impact excitation of groundstate ions to play the major role and neglecting all other processes leading to excitation, the ion density nz is given by

Type
Session 6. Poster Papers
Copyright
Copyright © Naval Research Laboratory 1984. Publication courtesy of the Naval Research Laboratory, Washington, DC.

References

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