A Vacuum Spectrometer for Studying the Chemical Effect on Soft X-Ray Spectra

Abstract

Soft X-ray spectroscopy promises to be one of the most powerful techniques for solving a wide variety of materials characterization problems. Although chemical analysis of the light elements is commonly done by the electron microprobe and X-ray fluorescence, the “chemical effect on X-ray spectra” has been utilized in relatively few cases. This appears to result from a general lack of appreciation for the applicability of chemical effect measurements and perhaps to a greater extent it is due to the unavailability of appropriate soft X-ray spectrometers. Most studies have been carried out using instruments that were not particularly well suited to chemical effect studies. The purpose of this paper is to describe a versatile new soft X-ray spectrometer and auxiliary equipment for the study of the chemical effect. The spectrometer is housed in a versatile, high vacuum chamber 24 inches in diameter by 4 5/16 inch vertical clearance.