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The Determination of Elemental Composition, Thickness and Crystalline Phases in Single and Multi-Layer Thin Films

Published online by Cambridge University Press:  06 March 2019

R. A. Brown ,
K. Toda  and
R. L. Wilson
R. A. Brown
Affiliation:
Rigaku/USk, Inc. Danvers, MA
K. Toda
Affiliation:
Rigaku/USk, Inc. Danvers, MA
R. L. Wilson
Affiliation:
Rigaku/USk, Inc. Danvers, MA
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Extract

The purpose of this paper is to show how XRD and XRF can be used as complimentary tools to determine multi-layer thin film composition, both elemental and crystalline, as well as film thickness.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 33: Thirty-Eighth Annual Conference on Applications of X-ray Analysis, July 31 - August 4, 1989 , 1989 , pp. 197 - 204
Copyright
Copyright © International Centre for Diffraction Data 1989

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