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The D5000 HR System: Increased Resolution for the Multipurpose Siemens X-Ray Diffractometer

Published online by Cambridge University Press:  06 March 2019

L. Brügemann
L. Brügemann*
Affiliation:
Siemens AG, Analytical X-ray Instruments, W-7500 Karlruhe, Germany
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Abstract

Lately available X-ray optics and 4-axis sample cradles increased the versatility of the Siemens D5000 diffractometer to high resolution applications. The possibilities of the D5000 HR hardware setup are illustrated by presenting diffraction measurements on systems relevant to semiconductor and thin film technology. Well known theoretical approaches are used for the software supported interpretation of the data.

Type
X. XRD Techniques and Instrumentation
Information
Advances in X-Ray Analysis , Volume 36: Forty-First Annual Conference on Applications of X-ray Analysis, August 3-7, 1992 , 1992 , pp. 649 - 652
Copyright
Copyright © International Centre for Diffraction Data 1992

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References

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