Published online by Cambridge University Press: 06 March 2019
The strain distribution associated with incipient microplasticity and its response to subsequent annealing were studied in smooth and notched silicon crystals. The characterization of plastic and elastic residual strains was carried out by X-ray topography based on PendellBsung Fringe (PF) patterns and was supplemented by X-ray doublecrystal diffractometry and specimen scanning with automatic Bragg angle control (ABAC). It was shown that the sites at or near the surface were preferred sites where, upon mechanical deformation, dislocation sources became activated. Microplastic zones thus formed constrained long-range, residual, elastic strains.