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Beam Stability in the Electron Probe Microanalyzer

Published online by Cambridge University Press:  06 March 2019

Ray Fitzgerald
Ray Fitzgerald*
Affiliation:
University of California La Jolla, California
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Abstract

The reliability and speed at which an analysis can be completed, using methods of the electron probe microanalyzer, depends to a large extent on the stability of the electron beam. The incident electron energy and total incident current must be maintained within prescribed limits to ensure accurate and reproducible X-ray data. The incident electron probe diameter must also stay within prescribed limits for maximum resolution over the analysis time. The performance of the electron optics is discussed in relation to high-voltage supply, current regulators, and filament supply. Methods for probe current stabilization using aperture sensing are discussed.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 7: Twelfth Annual Conference on Applications of X-ray Analysis, August 7-9, 1963 , 1963 , pp. 369 - 381
Copyright
Copyright © International Centre for Diffraction Data 1963

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References

1. Zworykin, V. K., Morton, G. A., Romeberg, E. G., Millier, J., and Vance, A. W., Electron Optics and the Electron Microscope, John Wiley & Sons, Inc., New York, 1945, p. 126.Google Scholar
2. Hall, C. E., Introduction to Electron Microscopy, McGraw-Hill Book Co., Inc., New York, 1953, p. 122.Google Scholar
3. Castsing, R., “Electron Probe Microanalysis,” Advances in Electronics and Electron Physics 13: 336, 1960.Google Scholar