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Advances in Boron Measurement with Wavelength Dispersive XRF

Published online by Cambridge University Press:  06 March 2019

B. W. Adamson ,
K. Juchli  and
G. Matula
B. W. Adamson
Affiliation:
Applied Research Laboratories En Vallairef CH-1024 Ecublens, Switzerland
K. Juchli
Affiliation:
Applied Research Laboratories En Vallairef CH-1024 Ecublens, Switzerland
G. Matula
Affiliation:
Applied Research Laboratories En Vallairef CH-1024 Ecublens, Switzerland
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Extract

Over recent years, the availability of man made “crystals“ (Layered Synthetic Microstructures or Multilayers) has led to a significant extension of the capabilities of WD XRF for the lighter elements. In particular, the elements from Atomic Number 5 (Boron) to Atomic Number 12 (Magnesium) have benefitted.

This paper will cover the lower end of this range and show how selection of multilayers is made. It will then consider the optimization of collimation to suit The performance characteristics of the multilayer device. One of many new applications opened up by these advances will be covered in detail (analysis of Boron in BPSG coatings on Silicon Wafers). Finally, a word of warning will be issued to those seeking to apply this newfound performance in routine XRF environments.

Type
III. Long-Wavelength X-Ray Spectrometry
Information
Advances in X-Ray Analysis , Volume 34: Thirty-Ninth Annual Conference on Applications of X-ray Analysis, July 30 - August 3, 1990 , 1990 , pp. 131 - 137
Copyright
Copyright © International Centre for Diffraction Data 1990

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References

1. Boyer, B. W. and Anzelmo, J. A., Applied Research Laboratories, Matching Collimator Divergence to Dispersion Devices for Light Element Analysis: Part II. An Examination of 2D Spacing and Multi Layer Component Materials for the Analysis of Carbon and Boron … Internal Paper.Google Scholar
2. Anaelmo, J. A. and Boyer, B. W., Applied Research Laboratories, The Analysis of Carbon and Other Light Elements Using Layered Synthetic Microstructures … Advances in X-Ray Analysis, Plenum Press, 1987.Google Scholar