Hostname: page-component-745bb68f8f-b95js Total loading time: 0 Render date: 2025-02-08T05:04:53.940Z Has data issue: false hasContentIssue false
  • English
  • Français

Theoretical Formulas for Film Thickness Measurement by Means of Fluorescence X-Rays

Published online by Cambridge University Press:  06 March 2019

Toshio Shiraiwa  and
Nobukatsu Fujino
Toshio Shiraiwa
Affiliation:
Central Research Laboratories, Sumitomo Metal Ind. Amagasaki, Japan
Nobukatsu Fujino
Affiliation:
Central Research Laboratories, Sumitomo Metal Ind. Amagasaki, Japan
Get access

Abstract

The fluorescence x-ray method of the coating thickness measurement is theoretically studied. The theoretical formulas of the fluorescence x-ray intensity from the coating and from the substrate are obtained which include the enhancement effect between the coating and the substrate. The formulas are applied to the following examples and are confirmed experimentally: zinc on steel; tin on steel; aluminum on steel and on PMMA. The experimental results agree well with the theoretical results.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 12: Seventeenth Annual Conference on Applications of X-ray Analysis, August 21-23, 1968 , 1968 , pp. 446 - 456
Copyright
Copyright © International Centre for Diffraction Data 1968

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Liebhafsky, H.A., Pfeiffer, H.G., Winslow, E.H. and Zemany, P.D., X-ray Absorption and Emission in Analytical Chemistry, John Wiley & Sons, Inc., New York, 1962.Google Scholar
2. Bertin, E.P. and Longobucco, R.J., “X-Ray Method for Determination of Plate Thickness,” Metal Finishing 60: 42–44, 1962.Google Scholar
3. Shiraiwa, T. and Fujino, N., “Theoretical Calculation of Fluorescent. X-Ray Intensities in Fluorescent X-Ray Spectrochemical Analysis,” Japan. J. Appl. Phys. 5: 886–899, 1966.Google Scholar
4.The International Union of Crystallography, International Tables for X-Ray Crystallography, Vol. III. Kynoch Press, Birmingham, 1962.Google Scholar
5. Victoreen, J.A., “The Calculation of X-Ray Mass Absorption Coefficients,” J. Appl. Phys. 20: 1141, 1949.Google Scholar
6. Compton, A.H. and Allison, S.K., “X-Rays in Theory and Experiment” 2nd Ed., D. Van Nostrand Co., Inc., New York, 1935.Google Scholar
7. Flügge, W., Four-Place Tables of Transcendental Functions, Pergamon Press, London, 1954, p. 126–129.Google Scholar
8. Ishiguro, E., Yuasa, S., Sakamoto, M. and Kimura, T., “Tables Useful for the Calculation of the Molecular Integrals V,” Natural Sci. Rpt. Ochanomizu Univ. 4: 176–191, 1953.Google Scholar