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The Study of Some Peculiar Phenomena in Ultra-Soft X-ray Measurements Using Synthetic Multilayer Crystals

Published online by Cambridge University Press:  06 March 2019

H. Kobayashi ,
K. Toda ,
H. Kohno ,
T. Arai  and
R. Wilson
H. Kobayashi
Affiliation:
Rigaku Industrial Corporation Osaka, Japan
K. Toda
Affiliation:
Rigaku Industrial Corporation Osaka, Japan
H. Kohno
Affiliation:
Rigaku Industrial Corporation Osaka, Japan
T. Arai
Affiliation:
Rigaku Industrial Corporation Osaka, Japan
R. Wilson
Affiliation:
Rigaku/USA, Inc. Danvers, MA
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Extract

Several interesting phenomena involving ultra-soft X-rays and synthetic multilayer crystals were studied as a result of the on-going process of improving the Rigaku Mode] 3630 Wafer Analyzer for the measurement of BPSG (1000-2500 Å) and other thin films.1-3 These phenomena can be divided into four categories; “ghost” peaks, diffraction from the substrate, fluorescence from the multilayer and higher order lines from the multilayer. Each of these is a potential snurce nf error in the measurement of ultra-soft X-rays, Fortunately, as will be shown, each can be readily dealt with.

Type
IV. New Developments in X-Ray Sources, Instrumentation and Techniques
Information
Advances in X-Ray Analysis , Volume 38: Forty-third Annual Conference on Applications of X-ray Analysis , 1994 , pp. 307 - 312
Copyright
Copyright © International Centre for Diffraction Data 1994

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References

1. Kohno, H., Arai, T., Araki, Y. and Wilson, R., “High Accuracy Analysis of BPSG Thin Films on Silicon Wafers by X-Ray Wafer Analyzer”, Advances in X-Ray Analysis, vol. 37, p. 229, 1994.Google Scholar
2. Kohno, H., and Arai, T., “Instrumeiiations and Applications for the Soft and Ultra-soft Measurements”, Advances in X-Ray Analysis vol. 36, p. 59–64, 1993.Google Scholar
3. Huang, T.C., Fung, A., and White, R. L., “Recent Measurements of Long Wavelength X-Rays Using Synthetic Multilayers”, X-Ray Spectrometry, vol. 18, p. 53–56, 1989.Google Scholar