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A Soft X-ray Experimental Facility

Published online by Cambridge University Press:  06 March 2019

John V. Gilfrich ,
David J. Nagel ,
Mohammad Fatemi ,
Richard D. Bleach  and
Karrol R. Hudson
John V. Gilfrich
Affiliation:
Naval Research Laboratory Washington, D.C. 20375-5000
David J. Nagel
Affiliation:
Naval Research Laboratory Washington, D.C. 20375-5000
Mohammad Fatemi
Affiliation:
Naval Research Laboratory Washington, D.C. 20375-5000
Richard D. Bleach
Affiliation:
Naval Research Laboratory Washington, D.C. 20375-5000
Karrol R. Hudson
Affiliation:
Naval Research Laboratory Washington, D.C. 20375-5000
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Abstract

A high vacuum soft x-ray source has been coupled to a large volume experimental chamber to provide a versatile facility for x-ray investigations in the energy range of 0.1 to 10 kev. The source chamber presently contains a modified Herike tube, but can employ any of a variety of source designs. The large experimental chamber is equipped with a kinematic mount to position a number of x-ray optical instruments. The source and experimental chambers are connected through a high vacuum valve/shutter, and are pumped separately with provision for a thin window to isolate one from the other, single and double crystal spectrometers have been used in the experimental chamber. A variable chord diffractometer/reflectometer using double crystal monnotiromatization has been designed, in addition, the facility has been used to expose photoresists in x-ray lithography tests.

Type
IV. Recent Developments in Long-Wavelength Spectroscopy
Information
Advances in X-Ray Analysis , Volume 28: Thirty-Third Annual Conference on Applications of X-ray Analysis, July 30 - August 3, 1984 , 1984 , pp. 127 - 135
Copyright
Copyright © International Centre for Diffraction Data 1984

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