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Interfaces and Strain in InGaAsP/InP Heterostructures Assessed with Dynamical Simulations of High-Resolution X-ray Diffraction Curves

Published online by Cambridge University Press:  06 March 2019

J. M. Vandenberg
J. M. Vandenberg*
Affiliation:
AT&T Bell Laboratories Murray Hill, New Jersey 07974
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Abstract

The interfacial structure of a lattice-matched InGaAs/InP/(100)InP superlattice with a long period of ∼630Å has been studied by fully dynamical simulations of high-resolution x-ray diffraction curves. This structure exhibits a very symmetrical x-ray pattern enveloping a large number of closely spaced satellite intensities with pronounced maxima and minima. It appears in the dynamical analysis that the position and shape of these maxima and minima is extremely sensitive to the number N of molecular layers and atomic spacing d of the InGaAs and InP layer and in particular the presence of strained interfacial layers. The structural model of strained inrerfaces was also applied to an epitaxial lattice-matched 700Å InP/400Å InGaAsP/(100)InP heterostructure.

Type
III. Applications of Diffraction to Semiconductors and Films
Information
Advances in X-Ray Analysis , Volume 38: Forty-third Annual Conference on Applications of X-ray Analysis , 1994 , pp. 175 - 180
Copyright
Copyright © International Centre for Diffraction Data 1994

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