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Grazing Incidence X-Ray Spectroscopy for Thin Layer Analysis

Published online by Cambridge University Press:  06 March 2019

Hideki Hashimoto ,
Hiroshi Nishioji  and
Hideo Saisho
Hideki Hashimoto
Affiliation:
Toray Research Center Inc. Sonoyama 1-Chome, Otsu, Shiga 520, Japan
Hiroshi Nishioji
Affiliation:
Toray Research Center Inc. Sonoyama 1-Chome, Otsu, Shiga 520, Japan
Hideo Saisho
Affiliation:
Toray Research Center Inc. Sonoyama 1-Chome, Otsu, Shiga 520, Japan
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Abstract

Reflection and fluorescence intensity profile curves for thin films were measured under the grazing incidence conditions using synchrotron radiation. A titanium layer and a carbon / titanium bilayer sputtered on a silicon wafer were subjected to heat treatment. The analysis of the reflection and fluorescence profile curves shows that the sample without the heat treatment has another high-density layer on the surface or interface, and that the heat treatment results in the removal of the high-density layer and the formation of a thick homogeneous layer.

Type
XI. Thin-Film and Surface Characterization by XRS and XPS
Information
Advances in X-Ray Analysis , Volume 35 , Issue B: First Pacific-International Congress on X-ray Analytical Methods (PICXAM). Fortieth Annual Conference on Applications of X-ray Analysis, August 7-16, 1991 , 1991 , pp. 807 - 812
Copyright
Copyright © International Centre for Diffraction Data 1991

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