Hostname: page-component-586b7cd67f-rdxmf Total loading time: 0 Render date: 2024-12-01T03:47:47.069Z Has data issue: false hasContentIssue false
  • English
  • Français

Determination of Crystal Structure and Cation Distribution in Thin Films

Published online by Cambridge University Press:  06 March 2019

G. Will ,
T. C. Huang  and
F. Sequeda
G. Will
Affiliation:
Mineralogical Institute of Bonn University D-5300 Bonn 1, Germany
T. C. Huang
Affiliation:
IBM Research Division, Almaden Research Center, San Jose California, 95120-6099, USA
F. Sequeda
Affiliation:
IBM Research Division, Almaden Research Center, San Jose California, 95120-6099, USA
Get access

Extract

The structural characterization of thin films is important for research development and manufacturing of electronic, magnetic, optical, and other high-tech materials. The grazing incidence X-ray diffraction technique has bean used successfully for the determination of crystalline phases, structural-depth profiles, crystallite size, and strain, etc. of thin films with thickness's down to a few tens of Å, If the crystal structure, e.g. the distribution of atoms in the unit cell, or the crystallinity and texture (or preferred orientation) of a film is of interest, the conventional Bragg-Brentano diffractometer technique with the θ-2θ scanning geometry has been found to be appropriate.

Type
III. Thin-Film and Surface Characterization by XRD
Information
Advances in X-Ray Analysis , Volume 35 , Issue A: First Pacific-International Congress on X-ray Analytical Methods (PICXAM). Fortieth Annual Conference on Applications of X-ray Analysis, August 7-16, 1991 , 1991 , pp. 151 - 157
Copyright
Copyright © International Centre for Diffraction Data 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Geller, S., 1967, Crystal Chemistry of Garnets, Z. Krist., 125: 1 Google Scholar
Jansen, E., Schäfer, W., Szepesvary, A., and Will, G., 1989, The Solid State Scintillation PSD Julios: A Fast And High Resolution Detector System For Thermal Neutrons, Physica E. 156 & 157: 584 Google Scholar
Jansen, E., Schäfer, W., and Will, G., 1988, Profile Fitting And The Twostep Method IN Neutron Powder Diffractometry For Structure And Texture Analysis, J. Appl. Cryst., 21: 288 Google Scholar
Suzuki, T., Sequeda, F., Do, H., Huang, T.C., and Gorman, G., 1990, Magnetic And Magneto-optic Properties OF Bi-Substituted Garnet Films Crystallized BY Rapid Thermal Processing, J. Appl. Phys., 67: 4435 Google Scholar
Will, G., 1979, Powls: A Powder Least Squares Program, J. Appl. Cryst., 12: 483 Google Scholar
Will, G. , 1989, Crystal Structure Analysis From Powder Diffraction Data, Z. Krist., 188: 169 Google Scholar
Will, G., and Hoffner, Ch., 1991, HFIT: A Program For Interactive Analysis OF Powder Diffraction Data, This volume.Google Scholar
Will, G., Jansen, E. , and Schäfer, W., 1990, Structure Refinements IN Chemistry And Physics, A Comparative Study Using The Rietveld And Twostep Method, Advances in X-Ray Analysis. 33: 261 Google Scholar