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Depth Profiling by Means of X-Ray Fluorescence Analysis

Published online by Cambridge University Press:  06 March 2019

H. Ebel ,
R. Svagera  and
S. Rezai Afshar
H. Ebel
Affiliation:
Institut für Angewandte und Technische Physik Technische Universität Wien, A 1040 Wien, Austria
R. Svagera
Affiliation:
Institut für Angewandte und Technische Physik Technische Universität Wien, A 1040 Wien, Austria
S. Rezai Afshar
Affiliation:
Institut für Angewandte und Technische Physik Technische Universität Wien, A 1040 Wien, Austria
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Extract

Sherman described the excitation of characteristic radiations by primary x-rays and by secondary excitation. The derivation has been made assuming a homogeneous sample. Criss and Birks inverted the problem from the calculation of fluorescent countrates to the quantitative XFA by means of fundamental parameters. Theoretical and instrumental developments enabled a reduction of the sample area and led to small area XFA and imaging XFA sytems. Depth profiling by means of XFA is a further development. We continue the original concept of variable take-off angle technique for the determination of film thicknesses without reference samples and apply the variation of the incidence angle to depth profiling.

Type
XI. Thin-Film and Surface Characterization by XRS and XPS
Information
Advances in X-Ray Analysis , Volume 35 , Issue B: First Pacific-International Congress on X-ray Analytical Methods (PICXAM). Fortieth Annual Conference on Applications of X-ray Analysis, August 7-16, 1991 , 1991 , pp. 783 - 794
Copyright
Copyright © International Centre for Diffraction Data 1991

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References

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