Skip to main content Accessibility help
×
Hostname: page-component-78c5997874-t5tsf Total loading time: 0 Render date: 2024-11-08T00:14:42.435Z Has data issue: false hasContentIssue false

9 - Laser processing of organic materials

Published online by Cambridge University Press:  04 December 2009

Costas P. Grigoropoulos
Affiliation:
University of California, Berkeley
Get access

Summary

Introduction

Laser ablation of polymers and other molecular materials constitutes the basis for a range of well-established applications, such as matrix-assisted laser desorption–ionization (MALDI) (Hillenkamp and Karas, 2000), laser surgery (Niemz, 2003) including the widely used laser-assisted in situ keratomileusis (LASIK) technique, surface microfabrication and lithography (Lankard and Wolbold, 1992), and pulsed laser deposition (PLD) of organic coatings (Bäuerle, 2000; Chrisey and Hubler, 1994). Interaction of UV laser pulses with an organic substance typically results in photothermal and/or photochemical processes in the irradiated material. Generally, photothermal processes, which produce heat in the sample, dominate when the laser photon energy is small, whereas photochemical processes occur when the laser photon energy is larger than the chemical-bond energies of the molecules.

For lasers operating at near-IR wavelengths, photothermal processes usually play a major role. With deep-UV (wavelength shorter than ∼200 nm) laser irradiation, in which the photon energy is larger than the typical energy of the chemical bonds of molecules, photochemical processes are usually responsible for the onset of ablation. For laser ablation of organic materials with wavelengths between the near IR and deep UV, photothermal and photochemical processes are often interrelated (Ichimura et al., 1994). On the other hand, the characteristics of material ejection depend on the nature of the ablation process (Srinivasan, 1986; Georgiou et al., 1998). For instance, ablation of organic materials results in little lateral damage in the sample when the photochemical processes are dominant.

Type
Chapter
Information
Transport in Laser Microfabrication
Fundamentals and Applications
, pp. 265 - 281
Publisher: Cambridge University Press
Print publication year: 2009

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Aguilar, C. A., Lu, Y., Mao, S. S., and Chen, S., 2005, “Direct Micro-patterning of Biodegradable Polymers using Ultraviolet and Femtosecond Lasers,” Biomaterials, 26, 7642–7649.CrossRefGoogle ScholarPubMed
Allen, T. M., and Cullis, P. R., 2004, “Drug Delivery Systems: Entering the Mainstream,” Science, 303, 1818–1822.CrossRefGoogle Scholar
Bäuerle, D., 2000, Laser Processing and Chemistry, Berlin, Springer-Verlag.CrossRefGoogle Scholar
Behravesh, E., Yasko, A. W., Engle, P. S., and Mikos, A. G., 1999, “Synthetic Biodegradable Polymers for Orthopaedic Applications,” Clin. Orthopaedics, 367(S), S118–S129.CrossRefGoogle Scholar
Berkenkamp, S., Menzel, C., Hillenkamp, F., and Dreisewerd, K., 2002, “Measurements of Mean Initial Velocities of Analyte and Matrix Ions in Infrared Matrix-Assisted Laser Desorption Ionization Mass Spectrometry,” J. Am. Soc. Mass Spectrometry, 13, 209–220.CrossRefGoogle ScholarPubMed
Boulnois, J. L., 1986, “Time–Irradiance Reciprocity Relationship as a Model for Laser–Tissue Interactions,” Lasers Med. Sci., 6, 168.Google Scholar
Brannon, J. H., Lankard, J. R., Baise, A. I., Burns, F., and Kaufman, J., 1985, “Excimer Laser Etching of Polyimide,” J. Appl. Phys., 58, 2036–2043.CrossRefGoogle Scholar
Brunco, D. P., Thompson, M. O., Otis, C. E., and Goodwin, P. M., 1992, “Temperature Measurements of Polyimide during KrF Excimer Laser Ablation,” J. Appl. Phys., 72, 4344–4350.CrossRefGoogle Scholar
Cain, S. R., Burns, F. C., Otis, C. E., and Braren, B., 1992, “Photothermal Description of Polymer Ablation: Absorption Behavior and Degradation Time Scales,” J. Appl. Phys., 72, 5172–5178.CrossRefGoogle Scholar
Chrisey, D. B., and Hubler, G. K., eds., 1994, Pulsed Laser Deposition of Thin Films, New York, Wiley-Interscience.
Cramer, R., Haglund, R. F., and Hillenkamp, F., 1997, “Matrix-Assisted Laser Desorption and Ionization in the O—H and C=O Absorption Bands of Aliphatic and Aromatic Matrices: Dependence on Laser Wavelength and Temporal Beam Profile,” Int. J. Mass Spectrometry, 169, 51–67.CrossRefGoogle Scholar
Dlott, D. D., 1990, “Ultrafast Vibrational Energy Transfer in the Real World: Laser Ablation, Energetic Solids, and Hemeproteins,” J. Opt. Soc. Am. B, 7, 1638–1652.CrossRefGoogle Scholar
Dreisewerd, K., Schürenberg, M., Karas, M., and Hillenkamp, F., 1995, “Influence of the Laser Intensity and Spot Size on the Desorption of Molecules and Ions in Matrix-Assisted Laser-Desorption Ionization with a Uniform Beam Profile,” Int. J. Mass Spectrometry, 141, 127–148.CrossRefGoogle Scholar
Dreisewerd, K., Schürenberg, M., Karas, M., and Hillenkamp, F., 1996, “Matrix-Assisted Laser Desorption/Ionization with Nitrogen Lasers of Different Pulse Widths,” Int. J. Mass Spectrometry, 154, 171–178.CrossRefGoogle Scholar
Dyer, P. E., 2003, “Excimer Laser Polymer Ablation: Twenty Years on,” Appl. Phys. A, 77, 167–163.Google Scholar
Dyer, P. E., and Sidhu, J., 1985, “Excimer Laser Ablation and Thermal Coupling Efficiency to Polymer-Films,” J. Appl. Phys., 57, 1420–1422.CrossRefGoogle Scholar
Garrison, B. J., and Srinivasan, R., 1985, “Laser Ablation of Organic Polymers – Microscopic Models for Photochemical and Thermal Processes,” J. Appl. Phys., 57, 2909–2914.CrossRefGoogle Scholar
Georgiou, S., Koubenakis, A., Lassithiotaki, M., and Labrakis, J., 1998, “Formation and Desorption Dynamics of Photoproducts in the Ablation of van der Waals films of Chlorobenzene at 248 nm,” J. Chem. Phys., 109, 8591–8600.CrossRefGoogle Scholar
Gorodetsky, G., Kazyaka, T. G., Melcher, R. J., and Srinivasan, R., 1985, “Calorimetric and Acoustic Study of Ultraviolet-Laser Ablation of Polymers,” Appl. Phys. Lett., 46, 828–830.CrossRefGoogle Scholar
Handschuh, M., Nettesheim, S., and Zenobi, R., 1999, “Laser-Induced Molecular Desorption and Particle Ejection from Organic Films,” Appl. Surf. Sci., 137, 125–135.CrossRefGoogle Scholar
Hansen, S. G., and Robitaille, T. E., 1988a, “Formation of Polymer Films by Pulsed Laser Evaporation,” Appl. Phys. Lett., 52, 81–83.CrossRefGoogle Scholar
Hansen, S. G., and Robitaille, T. E., 1988b, “Arrival Time Measurements of Films Formed by Pulsed Laser Evaporation of Polycarbonate and Selenium,” J. Appl. Phys., 84, 2122–2129.CrossRefGoogle Scholar
Heitz, J., and Dickinson, J. T., 1999, “Characterization of Particulates Accompanying Laser Ablation of Pressed Polytetrafluorethylene (PTFE) Targets,” Appl. Phys. A, 68, 515–523.CrossRefGoogle Scholar
Hillenkamp, F., and Karas, M., 2000, “Matrix-Assisted Laser Desorption/Ionization, an Experience,” Int. J. Mass Spectrometry, 200, 71–77.CrossRefGoogle Scholar
Hillenkamp, F., Pratesi, R., and Sacchi, C. A., eds., 1980, Lasers in Biology and Medicine, New York, Plenum Press, p. 37.CrossRef
Himmelbauer, M., Arenholz, E., and Baüerle, D., 1996, “Single-Shot UV-Laser Ablation of Polyimide with Variable Pulse Lengths,” Appl. Phys. A, 63, 87–90.Google Scholar
Ichimura, T., Mori, Y., Shinohara, H., and Nishi, N., 1994, “Photofragmentation of Chlorobenzene – Translational Energy Distribution of the Recoiling C1 Fragment,” Chem. Phys., 189, 117–125.CrossRefGoogle Scholar
Karas, M., Bachmann, D., Bahr, U., and Hillenkamp, F., 1987, “Matrix-Assisted Ultraviolet-Laser Desorption of Nonvolatile Compounds,” Int. J. Mass Spectrom. Ion Processes, 78, 53–68.CrossRefGoogle Scholar
Kawamura, Y., Toyoda, K., and Namba, S., 1982, “Effective Deep Ultraviolet Photoetching of Poly(methyl methacrylate) by an Excimer Laser,” Appl. Phys. Lett., 40, 374–375.CrossRefGoogle Scholar
Koubenakis, A., Labrakis, J., and Georgiou, S., 2001, “Pulse Dependence of Ejection Efficiencies in the UV Ablation of Bi-component van der Waals SolidsChem. Phys. Lett., 346, 54–60.CrossRefGoogle Scholar
Küper, S., Brannon, J., and Brannon, K., 1993, “Threshold Behavior in Polyimide Photoablation: Single-Shot Rate Measurements and Surface-Temperature Modeling,” Appl. Phys. A, 56, 43–50.CrossRefGoogle Scholar
Lankard, J. R., and Wolbold, G., 1992, “Excimer Laser Ablation of Polyimide in a Manufacturing Facility,” Appl. Phys. A, 54, 355–359.CrossRefGoogle Scholar
Van, D. A., McGuire, T., and Langer, R., 2003, “Small-Scale Systems for in vivo Drug Delivery,” Nature Biotechnol., 21, 1184–1191.Google Scholar
Linsker, R., Srinivasan, R., Wynne, J. J., and Alonso, D. R., 1984, “Far-Ultraviolet Laser Ablation of Atherosclerotic Lesions,” Lasers Surg. Medicine, 4, 201–206.CrossRefGoogle ScholarPubMed
McKenzie, A. L., 1990, “Physics of Thermal Processes in Laser Tissue Interaction,” Phys. Med. Biol., 35, 1175–1209.CrossRefGoogle ScholarPubMed
Middleton, J. C., and Tipton, A. J., 2000, “Synthetic Biodegradable Polymers as Orthopedic Devices,” Biomaterials, 21, 2335–2346.CrossRefGoogle ScholarPubMed
Niemz, M. H., 2003, Laser–Tissue Interactions: Fundamentals and Applications, 3rd edn, Berlin, Springer-Verlag.Google Scholar
Novis, Y., Pireaux, J. J., Brezini, A.et al., 1988, “Structural Origin of Surface Morphological Modifications Developed on Poly(ethylene terephthalate) by Excimer Laser Photoablation,” J. Appl. Phys., 64, 365–370.CrossRefGoogle Scholar
Oraevsky, A. A., Esenaliev, R. O., and Letokhov, V. S., 1991, “Pulsed Laser Ablation of Biological Tissue: Review of the Mechanisms,” in Laser Ablation, Mechanisms and Applications, edited by Miller, J. C. and Haglund, R. F., New York, Springer, pp. 112–122.CrossRefGoogle Scholar
Phipps, C., 2007, Laser Ablation and its Application, New York, Springer.CrossRefGoogle Scholar
Raimondi, F., Abolhassani, S., Brütsch, R.et al., 2000, “Quantification of Polyimide Carbonization after Laser Ablation,” J. Appl. Phys., 88, 3659–3666.CrossRefGoogle Scholar
Srinivasan, R., 1986, “Ablation of Polymers and Biological Tissue by Ultraviolet Lasers,” Science, 234, 559–565.CrossRefGoogle ScholarPubMed
Srinivasan, R., 1992, “Etching Polymer Films with Ultraviolet Laser Pulses of Long (10–400 μs) Duration,” J. Appl. Phys., 72, 1651–1653.CrossRefGoogle Scholar
Srinivasan, R., and Braren, B. 1989, “Ultraviolet Laser Ablation of Organic Polymers,” Chem. Rev., 89, 1303–1316.CrossRefGoogle Scholar
Srinivasan, R., Braren, B., and Casey, K. G., 1990, “Nature of Incubation Pulses in the Ultraviolet Laser Ablation of Polymethyl Methacrylate,” J. Appl. Phys., 68, 1842–1847.CrossRefGoogle Scholar
Srinivasan, R., Hall, R. R., Loehle, W. D., Wilson, W. D., and Albee, D. C., 1995, “Chemical Transformations of the Polyimide Kapton Brought about by Ultraviolet Laser Radiation,” J. Appl. Phys., 78, 4881–4887.CrossRefGoogle Scholar
Leeuwen, T., Jansen, E. D., Motamedi, M., Borst, C., and Welch, A. J., 1995, “Pulsed Laser Ablation of Soft Tissue,” in Optical–Thermal Response of Laser-Irradiated Tissue, edited by Welch, A. J. and Gemert, M. J. C., New York, Plenum Press, pp. 709–763.CrossRefGoogle Scholar
Vogel, A., and Venugopalan, V., 2003, “Mechanisms of Pulsed Laser Ablation of Biological Tissues,” Chem. Rev., 103, 577–644.CrossRefGoogle ScholarPubMed
Walsh, J. T., 1995, “Pulsed Laser Angioplasty: A Paradigm for Tissue Ablation, in Optical–Thermal Response of Laser-Irradiated Tissue; Welch, A. J., and Gemert, M. J. C., Eds., New York, Plenum Press, p. 865.CrossRefGoogle Scholar
Waynant, R. W., ed., 2002, Lasers in Medicine, Boca Raton, FL, CRC Press.Google Scholar
Welch, A. J., and Gemert, M. J. C., eds., 1995, Optical–Thermal Response of Laser-Irradiated Tissue, New York, Plenum Press.CrossRef
Westman, A., Huth-Fehre, T., Demirev, P.et al., 1994, “Matrix-Assisted Laser Desorption Ionization Dependence of the Ion Yield on the Laser Beam Incidence Angle,” Rapid Commun. Mass Spectrometry, 8, 388–393.CrossRefGoogle Scholar
Yeh, J. T. C., 1986, “Laser Ablation of Polymers,” J. Vac. Sci. Technol. A, 4, 653–658.CrossRefGoogle Scholar
Yingling, Y. G., and Garrison, B. J., 2007, “Incorporation of Chemical Reactions into UV Photochemical Ablation of Coarse-Grained Material,” Appl. Surf. Sci., 253, 6377–6381.CrossRefGoogle Scholar
Yingling, Y. G., Zhigilei, L. V., Garrison, B. J.et al., 2001, “Laser Ablation of Bicomponent Systems: A Probe of Molecular Ejection Mechanisms,” Appl. Phys. Lett., 78, 631–633.CrossRefGoogle Scholar
Zhigilei, L. V., and Garrison, B. J., 1999, “Molecular Dynamics Simulation Study of the Fluence Dependence of Particle Yield and Plume Composition in Laser Desorption and Ablation of Organic Solids,” Appl. Phys. Lett., 74, 1341–1343.CrossRefGoogle Scholar
Zhigilei, L. V., and Garrison, B. J., 2000, “Microscopic Mechanisms of Laser Ablation of Organic Solids in the Thermal and Stress Confinement Irradiation Regimes,” J. Appl. Phys., 88, 1281–1298.CrossRefGoogle Scholar
Zhigilei, L. V., Kodali, P. B. S., and Garrison, B. J., 1997, “Molecular Dynamics Model for Laser Ablation and Desorption of Organic Solids,” J. Phys. Chem. B, 101, 2028–2037.CrossRefGoogle Scholar
Zhigilei, L. V., Kodali, P. B. S., and Garrison, B. J., 1998, “A Microscopic View of Laser Ablation,” J. Phys. Chem. B, 102, 2845–2853.CrossRefGoogle Scholar

Save book to Kindle

To save this book to your Kindle, first ensure [email protected] is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about saving to your Kindle.

Note you can select to save to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be saved to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Available formats
×

Save book to Dropbox

To save content items to your account, please confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your account. Find out more about saving content to Dropbox.

Available formats
×

Save book to Google Drive

To save content items to your account, please confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your account. Find out more about saving content to Google Drive.

Available formats
×