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7 - Stress and thermal characterisation

Published online by Cambridge University Press:  05 February 2014

René-Yves Fillit
Affiliation:
Ecole des Mines
Roland Fortunier
Affiliation:
Ecole des Mines
Stepan Lucyszyn
Affiliation:
Imperial College of Science, Technology and Medicine, London
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Advanced RF MEMS , pp. 188 - 204
Publisher: Cambridge University Press
Print publication year: 2010

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References

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