Book contents
- Frontmatter
- Dedication
- Contents
- List of Contributors
- Preface
- List of Abbreviations
- 1 Introduction
- 2 Electromechanical modelling of electrostatic actuators
- 3 Switches and their fabrication technologies
- 4 Niche switch technologies
- 5 Reliability
- 6 Dielectric charging
- 7 Stress and thermal characterisation
- 8 High-power handling
- 9 Packaging
- 10 Impedance tuners and tuneable filters
- 11 Phase shifters and tuneable delay lines
- 12 Reconfigurable architectures
- 13 Industry roadmap for RF MEMS
- Author biographies
- Index
- References
7 - Stress and thermal characterisation
Published online by Cambridge University Press: 05 February 2014
- Frontmatter
- Dedication
- Contents
- List of Contributors
- Preface
- List of Abbreviations
- 1 Introduction
- 2 Electromechanical modelling of electrostatic actuators
- 3 Switches and their fabrication technologies
- 4 Niche switch technologies
- 5 Reliability
- 6 Dielectric charging
- 7 Stress and thermal characterisation
- 8 High-power handling
- 9 Packaging
- 10 Impedance tuners and tuneable filters
- 11 Phase shifters and tuneable delay lines
- 12 Reconfigurable architectures
- 13 Industry roadmap for RF MEMS
- Author biographies
- Index
- References
Summary
- Type
- Chapter
- Information
- Advanced RF MEMS , pp. 188 - 204Publisher: Cambridge University PressPrint publication year: 2010