Published online by Cambridge University Press: 05 February 2014
Introduction
Reliability can generally be defined as ‘the probability that an item will perform a required function under stated conditions for a stated period of time’. The term ‘probability’ indicates that one deals with probabilistic models and statistical methods. The term ‘required function’ assumes that one has a specification of satisfactory operation (i.e. it includes the definition of failure). The term ‘stated conditions’ includes the total physical environment (i.e. mechanical thermal, environmental and electrical conditions). Finally, the term ‘stated period of time’ gives one the concept of required lifetime; this mostly depends on the application [1].
In general, MEMS are very robust and reliable, and several systems have successfully reached maturity. However, placing RF MEMS into commercial products is proving more challenging. At the beginning of 2000, publications on RF MEMS indicated that switch technologies were very promising, but that “the trade-off is in contact lifetime” [2], “adequate lifetime has to be demonstrated” [3], they “suffer from reliability problems” [4] and “device reliability is a key factor in the ultimate insertion of RF MEMS devices into operational systems” [5]. A survey undertaken on publications on RF MEMS in 2005 showed that only 5% of the papers reported reliability data, and most of these data were very limited. Although research is on-going and the number of institutes working on RF MEMS is constantly increasing (e.g. EU's NoE AMICOM), there is, at this moment, still no RF MEMS capacitive switch to be found in any wireless communication system. Why is it taking so long to solve the reliability problems of RF MEMS, and especially for capacitive RF MEMS switches?
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