Book contents
- Frontmatter
- Dedication
- Contents
- List of Contributors
- Preface
- List of Abbreviations
- 1 Introduction
- 2 Electromechanical modelling of electrostatic actuators
- 3 Switches and their fabrication technologies
- 4 Niche switch technologies
- 5 Reliability
- 6 Dielectric charging
- 7 Stress and thermal characterisation
- 8 High-power handling
- 9 Packaging
- 10 Impedance tuners and tuneable filters
- 11 Phase shifters and tuneable delay lines
- 12 Reconfigurable architectures
- 13 Industry roadmap for RF MEMS
- Author biographies
- Index
Preface
Published online by Cambridge University Press: 05 February 2014
- Frontmatter
- Dedication
- Contents
- List of Contributors
- Preface
- List of Abbreviations
- 1 Introduction
- 2 Electromechanical modelling of electrostatic actuators
- 3 Switches and their fabrication technologies
- 4 Niche switch technologies
- 5 Reliability
- 6 Dielectric charging
- 7 Stress and thermal characterisation
- 8 High-power handling
- 9 Packaging
- 10 Impedance tuners and tuneable filters
- 11 Phase shifters and tuneable delay lines
- 12 Reconfigurable architectures
- 13 Industry roadmap for RF MEMS
- Author biographies
- Index
Summary
Radio frequency microelectromechanical systems (RF MEMS) have just entered a new and exciting era, with this previously elusive technology finally appearing on the open market. In 2008, in the United States and Japan, the first real devices were released and made commercially available to all. Today, there is intense research and development (R&D) activity, and at all levels from concept to manufacture, within North America, Europe and Asia.
The first book to be dedicated to RF MEMS was published in 2002, and two others soon followed in 2003. Within these books, the most recent references to be cited were papers published back in January 2003. Therefore, the motivation for another book on the subject is clear. At this point, I would like to pay homage to the groundbreaking book entitled RF MEMS: Theory, Design and Technology, by Gabriel M. Rebeiz. Indeed, all these books collectively represent a major literary milestone in RF MEMS and could be considered as a springboard for the later activities that led to the first commercially available devices.
- Type
- Chapter
- Information
- Advanced RF MEMS , pp. xvii - xixPublisher: Cambridge University PressPrint publication year: 2010