Niche switch technologies

doi:10.1017/CBO9780511781995.005

4 - Niche switch technologies

Published online by Cambridge University Press: 05 February 2014

Joo-Young Choi and

Edited by

Stepan Lucyszyn: Affiliation:
Imperial College of Science, Technology and Medicine, London
Suneat Pranonsatit: Affiliation:
Kasetsart University
Joo-Young Choi: Affiliation:
Sony Stuttgart Technology Centre
Andrew S. Holmes: Affiliation:
Imperial College London
Stepan Lucyszyn: Affiliation:
Imperial College of Science, Technology and Medicine, London

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Summary

Introduction

The past five years have seen a dramatic rise in the number of niche switch technologies being reported in the open literature. These include, but are not limited to, the general areas of latching, multiway and high-power. These niche technologies are covered within the same dedicated chapter, because of the synergy found between them. It should be of no surprise that there is a large overlap between these technologies; with latches being used in both multiway and high-power switches and the need for implementing high-power multiway switches.

Latching switches

For some applications, switches are required that are non-volatile and able to remain in any state after the source of actuation energy has been removed. For example, in certain safety-critical applications it is essential for the state of the system to be preserved in the event of a power failure. In other systems, for example, in portable electronic devices, remote sensors and unmanned aerial (or air or aircraft) vehicles (UAVs) or systems (UASs), the available power is limited and non-volatile switches are attractive because they require zero holding power, regardless of their state.

Type: Chapter
Information: Advanced RF MEMS , pp. 73 - 108

DOI: https://doi.org/10.1017/CBO9780511781995.005 [Opens in a new window]

Publisher: Cambridge University Press

Print publication year: 2010

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References

Ruan, M., Shen, J. and Wheeler, C. B., “Latching microelectromagnetic relays”, Sens. Actuators A, Phys., vol. 91, pp. 346–50, 2001CrossRef Google Scholar

Ruan, M., Shen, J. and Wheeler, C. B., “Latching micromagnetic relays”, J. Microelectromech. Syst., vol. 10, no. 4, pp. 511–7, Dec. 2001CrossRef Google Scholar

Ruan, M., Shen, J. and Wheeler, C. B., “Electronically latching micromagnetic switches and method of operating same”, U.S. Patent 6 496 912 B1, Dec. 2002

Ruan, M., Shen, J. and Tam, G., “Latching micro-magnetic switch with improved thermal reliability”, U.S. Patent Application 2006/0114084 A1, Jun. 2006

Campbell, T., “MEMS switch technology approaches the ‘ideal switch’”, Appl. Microw. Wireless, vol. 13, no. 5, pp. 100–7, 2001Google Scholar

Magfusion Inc., “Magnetic MEMS-based RF relay”, Microw. J., vol. 47, no. 1, 2004Google Scholar

Senturia, S. D., Microsystem Design, Kluwer, 2001Google Scholar

Que, L., Udeshi, K., Park, J. and Gianchandani, Y. G., “A bi-stable electro-thermal RF switch for high power applications”, Proceedings of 17th IEEE International Conference on Microelectromechanical Systems, MEMS 2004, Maastricht, The Netherlands, pp. 797–800, Jan. 2004.Google Scholar

Nordquist, C. D., Baker, M. S., Kraus, G. M., Czaplewski, D. A. and Patrizi, G.A., “Poly-silicon based latching RF MEMS switch”, IEEE Microw. Compon. Lett., vol. 19, no. 6, pp. 380–2, 2009CrossRef Google Scholar

Ebel, J. L., Cortez, R., Leedy, K. D. and Strawser, R. E., “A latching capacitive RF MEMS switch in a thin film package”, IEEE MTT-S International Microwave Symposium, San Francisco, CA, pp. 259–62, Jun. 2006Google Scholar

Sun, X.-Q., Farmer, K. R. and Carr, W. N., “A bistable microrelay based on two-segment multimorph cantilever actuators”, Proceedings of 11th IEEE International Conference on Microelectromechanical Systems, MEMS 1998, pp. 154–9, Jan. 1998

Agrawal, V., “A latching MEMS relay for DC and RF applications”, Proceedings 50th IEEE Holm Conference on Electrical Contacts and the 22nd International Conference on Electrical Contacts, Seattle, WA, pp. 222–5, Sep. 2004Google Scholar

Guckel, H., Klein, J., Christenson, T., Skrobis, K., Laudon, M. and Lovell, E. G., “Thermo-magnetic metal flexure actuators”, in Proceedings 5th IEEE Solid-State Sensor and Actuator Workshop, pp. 73–75, 1992CrossRef Google Scholar

Moseley, R. W., Yeatman, E. M., Holmes, A. S., Syms, R. R. A., Finlay, A. P. and Boniface, P., “Laterally actuated, low voltage, 3-port RF MEMS switch”, Proceedings 19th IEEE International Conference on Microelectromechanical Systems, MEMS 2006, Istanbul, Turkey, pp. 878–81, Jan. 2006Google Scholar

Chang, D. T., Schaffner, J. H., Hsu, T.-Y. and Schmitz, A. E., “RF MEMS switch with spring-loaded latching mechanism”, U.S. Patent 7 253 709 B1, Aug. 2007

Scardelletti, M. C., Ponchak, G. E. and Varaljay, N. C., “MEMS, Ka-band single-pole double-throw (SPDT) switch for switched line phase shifters”, Proceedings of the IEEE International Symposium on Antennas & Propagation, vol. 2, pp. 2–5, Jun. 2002CrossRef Google Scholar

Pacheco, S. P., Peroullis, D. and Katehi, L. P. B., “MEMS single-pole double-throw (SPDT) X and K-band switching circuits”, Proceedings of the IEEE MTT-S International Microwave Symposium, Phoenix, AZ, vol. 1, pp. 321–4, May 2001Google Scholar

DiNardo, S., Farinelli, P., Giacomozzi, F., Mannocchi, G., Marcelli, R., Margesin, B., Mezzanotte, P., Mulloni, V., Russer, P., Sorrentino, R., Vitulli, F. and Vietzorreck, L., “Broadband RF-MEMS based SPDT”, Proceedings of the 1st European Microwave Integrated Circuits Conference, Manchester, UK, pp. 501–4, Sep. 2006Google Scholar

Cho, I. J., Song, T., Baek, S. H. and Yoon, E., “A low-voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold”, MEMS 2005, pp. 32–35, Jan. 2005

Kim, J.-M., Lee, S., Baek, C.-W., Kwon, Y. and Kim, Y.-K., “Mechanically robust single crystalline silicon (SCS) single-pole-double-throw (SPDT) MEMS switch and its application to dual-band WLAN filter”, IEEE 20th International Conference on Micro Electro Mechanical Systems, MEMS 2007, Kobe, Japan, pp. 807–10, Jan. 2007Google Scholar

Kim, J.-M., Cheon, C., Kwon, Y. and Kim, Y.-K., “A hybrid RF MEMS probe array system with a SP3T RF MEMS silicon switch for permittivity measurement”, J. Micromech. Microeng., vol. 18, no. 085006, Aug. 2008CrossRef Google Scholar

Tang, M., Liu, A.-Q., Agarwal, A., Liu, Z.-S. and Luc, C., “A single-pole double-throw (SPDT) circuit using lateral metal-contact micromachined switches”, Sens. Actuators A, Phys., vol. 121, no. 1, pp. 187–96, May 2005CrossRef Google Scholar

Sterner, M., Roxhed, N., Stemme, G. and Oberhammer, J., “Mechanically tri-stable SPDT metal-contact MEMS switch embedded in 3D transmission line”, Proceedings of the 37th European Microwave Conference, Munich, Germany, pp. 1225–8, Oct. 2007Google Scholar

Yamane, D., Yamamoto, T., Urayama, K., Yamashita, K., Toshiyoshi, H. and Kawasaki, S., “A phase shifter by LTCC substrate with RF-MEMS switch”, Proceedings of 38th European Microwave Conference, Amsterdam, The Netherlands, pp. 611–3, Oct. 2008Google Scholar

Lee, D.-S., Jung, S.-W., Cho, N.-K., Kim, W.-H., Seong, W.-K. and Park, H.-D., “PZT actuated seesaw SPDT RF MEMS switch”, J. Phys. Conf. Ser., vol. 34, pp. 304–9, 2006CrossRef Google Scholar

Chung, D. J., Polcawich, R. G., Judy, D., Pulskamp, J. and Papapolymerou, J., “A SP2T and a SP4T switch using low loss piezoelectric MEMS”, IEEE MTT-S Int. Microw. Symp. Digest, Atlanta, GA, pp. 21–24, Jun. 2008Google Scholar

Tan, G.-L., Mihailovich, R. E., Hacker, J. B., DeNatale, J. F. and Rebeiz, G. M., “Low-loss 2- and 4-bit TTD MEMS phase shifters based on SP4T switches”, IEEE Trans. Microw. Theory Tech., vol. 51, no. 1, pp. 2450–7, Jan. 2003Google Scholar

Liu, A. Q., Palei, W., Tang, M. and Alphones, A., “Single-pole-four-throw switch using high-aspect-ratio lateral switches”, Electron. Lett., vol. 40, no. 18, pp. 1125–6, Sep. 2004CrossRef Google Scholar

Kang, S., Kim, H. C. and Chun, K., “Single pole four throw RF MEMS switch with double stop comb drive”, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008, Tuscan, AZ, pp. 1036–9, Jan. 2008CrossRef Google Scholar

Lee, J., Je, C. H., Kang, S., and Choi, C.-A., “A low-loss single-pole six-throw switch based on compact RF MEMS switches,” IEEE Trans. Microw. Theory Tech., vol. 53, no. 11, pp. 3335–44, Nov. 2005Google Scholar

Pranonsatit, S., Holmes, A. S., Robertson, I. D. and Lucyszyn, S., “Single-pole eight-throw RF MEMS rotary switch”, J. Microelectromech. Syst., vol. 15, no. 6, pp. 1735–44, Dec. 2006CrossRef Google Scholar

Lee, S., Kim, J.-M., Kim, Y.-K. and Kwon, Y., “A single-pole nine-throw antenna switch using radio-frequency microelectromechanical systems technology for broadband multi mode and multi-band front-ends”, J. Micromech. Microeng., vol. 18, no. 1, article no. 015012, Jan. 2008Google Scholar

Ziegler, V., Stehle, A., Georgiev, G., Schoenlinner, B., Prechtel, U., Seidel, H., Schmid, U. and Hartmann, J., “SP48T module architecture and RF-MEMS multi-throw switches for a multi-beam antenna measurement set-up at K- and Ka-Band”, 39th European Microwave Conference, Rome, Italy, Sep. 2009Google Scholar

Sattler, R., Plötz, F., Fattinger, G. and Wachutka, G., “Modeling of an electrostatic torsional actuator: demonstrated with an RF MEMS switch”, Sens. Actuators A, Phys., vol. 97--98, no. 1, pp. 337–46, Apr. 2002CrossRef Google Scholar

Yamane, D., Seita, H., Sun, W., Kawasaki, K., Fujita, H. and Toshiyoshi, H., “A 12-GHz DPDT RF-MEMS switch with layer-wise waveguide/actuator design technique”, IEEE 22nd International Conference on Micro Electro Mechanical Systems, MEMS 2009, pp. 888–91, Jan. 2009

Peterson, K. E., “Micromechanical membrane switches on silicon”, IBM J. Res. Dev., vol. 23, no. 4, pp. 376–85, 1979CrossRef Google Scholar

Braun, S., Oberhammer, J. and Stemme, G., “MEMS single-chip microswitch array for re-configuration of telecommunication networks”, 36th European Microwave Conference, Manchester, UK, pp. 811–4, Sep. 2006Google Scholar

Braun, S., Oberhammer, J. and Stemme, G., “Single-chip MEMS 5 × 5 and 20 × 20 double-pole single-throw switch arrays for automating telecommunication networks”, J. Micromech. Microeng., vol. 18, no. 015014, Jan. 2008CrossRef Google Scholar

Oberhammer, J. and Stemme, G., “Low voltage high isolation DC-to-RF MEMS switch based on an S-shaped film actuator”, IEEE Trans. Electron Devices, vol. 51, no. 1, pp. 149–55, Jan. 2004CrossRef Google Scholar

Strohm, K. M., Schauwecker, B., Pilz, D., Simon, W. and Luy, J-F., “RF-MEMS switching concept for high power applications”, Topical Meeting on Silicon Monolithic Integrated Circuits in RF System Digest, Ann Arbor, MI, pp. 42–46, Sep. 2001Google Scholar

Peroulis, D., Pacheco, S. P. and Katehi, L. P. B., “RF MEMS switches with enhanced power-handling capabilities”, IEEE Trans. Microw. Theory Tech., vol. 52, no. 1, pp. 59–68, Jan. 2004CrossRef Google Scholar

Grenier, K., Dubuc, D., Ducarouge, B., Conedera, V., Bourrier, D., Ongareau, E., Derderian, P. and Plana, R., “High power handling RF MEMS design and technology”, 18th IEEE International Conference on Microelectromechanical Systems, MEMS 2005, Miami, FL, pp. 155–8, Jan. 2005Google Scholar

Hah, D. and Hong, S., “A low-voltage actuated micromachined microwave switch using torsion springs and leverage”, IEEE Trans. Microw. Theory Tech., vol. 48, no. 12, pp. 2540–5, Dec. 2000Google Scholar

Milanovic, V., Maharbiz, M., Singh, A., Warneke, B., Zhou, N., Chan, H. K. and Pister, K. S. J., “Microrelays for batch transfer integration in RF systems”, 13th IEEE International Conference on Microelectromechanical Systems, pp. 787–92, Jan. 2000

Simon, W., Schauwecker, B., Lauer, A. and Wien, A., “Designing a novel RF MEMS switch for broadband power applications”, 32nd European Microwave Conference, Milan, Italy, pp. 519–22, Sep. 2002Google Scholar

Zavracky, P. M., McGruer, N. E., Morrison, R. H. and Potter, D., “Microswitches and microrelays with a view toward microwave applications”, Int. J. RF Microw. CAE, vol. 9, no. 4, pp. 338–47, 19993.0.CO;2-Q>CrossRef Google Scholar

Nishijima, N., Hung, J.-J. and Rebeiz, G. M., “Parallel-contact metal-contact RF MEMS switches for high power applications”, 17th IEEE International Conference on Microelectromechanical Systems, Maastricht, The Netherlands, pp. 781–4, Jan. 2004Google Scholar

Chow, L. L. W., Wang, Z., Jensen, B. D., Saitou, K., Volakis, J. L. and Kurabayashi, K., “Skin effect aggregated heating in RF MEMS suspended structures”, IEEE MTT-S Int. Microw. Symp. Digest, pp. 2143–6, Jun. 2005

McErlean, E. P., Hong, J.-S., Tan, S. G., Wang, L., Cui, Z., Greed, R. B. and Voyce, D. C., “2 X 2 RF MEMS switch matrix”, IEE Proc. Microw. Antennas. Propagation, pp. 449–54, Dec. 2005

Jensen, B. D., Chow, L. W., Webbink, R. F., Saitou, K., Volakis, J. L. and Kurabayashi, K., “Force dependence of RF MEMS switch contact heating”, 17th IEEE International Conference on Microelectromechanical Systems, Maastricht, The Netherlands, pp. 137–40, Jan. 2004Google Scholar

Girbau, D., Pradell, L., Lázaro, A. and À. Nebot, , “Electrothermally actuated RF MEMS switches suspended on a low-resistivity substrate”, J. Microelectromech. Syst., vol. 16, no. 5, pp. 1061–70, Oct. 2007CrossRef Google Scholar

Girbau, D., Lázaro, A. and Pradell, L., “RF MEMS switches based on the buckle-beam thermal actuator”, Proceedings of 33rd European Microwave Conference, Munich, Germany, pp. 651–4, Oct. 2003Google Scholar

Daneshmand, M., Yan, W. D., and Mansour, R. R., “Thermally actuated multiport RF MEMS switches and their performance in a vacuumed environment”, IEEE Trans. Microw. Theory Tech., vol. 55, no. 6, pp. 1229–36, Jun. 2007CrossRef Google Scholar

Hudson, T. D., “Development of piezoelectric RF MEMS switch and phase shifter”, Proceedings of 17th Biennial University/Government/Industry Micro/Nano Symposium, UGIM 2008, pp. 112–15, Jul. 2008

Kwon, H., Choi, D.-J., Park, J.-H., Lee, H.-C., Park, Y.-H., Kim, Y.-D., Nam, H.-J., Joo, Y.-C. and Bu, J.-U., “Contact materials and reliability for high power RF-MEMS switches”, 20th IEEE International Conference on Microelectromechanical Systems, pp. 231–4, Jan. 2007

Kohn, E., Adamschika, M., Schmida, P., Ertla, S. and Flöter, A., “Diamond electro-mechanical micro devices – technology and performance”, Diamond Related Mater., vol. 10, no. 9, pp. 1684–91, Sep. 2001CrossRef Google Scholar

Kohn, E., Kusterer, J. and Denisenko, A., “Diamond for high power electronics”, IEEE MTT-S Int. Microw. Symp. Digest, pp. 901–4, Jun. 2005

Daneshmand, M., Mansour, R. R. and Sarkar, N., “RF MEMS waveguide switch”, IEEE MTT-S Int. Microw. Symp. Digest, vol. 2, pp. 589–92, Jun. 2004Google Scholar

Chen, C.-H. and Peroulis, D., “Liquid RF MEMS wideband reflective and absorptive switches”, IEEE Trans. Microw. Theory Techn., vol. 55, no. 12, pp. 2919–9, Dec. 2007CrossRef Google Scholar

Choi, J.-Y., Lee, J.-S. and Lucyszyn, S., “Development of RF MEMS switches for high power applications”, IEEE Mediterranean Microwave Symposium, MMS’2006, Genova, Italy, pp. 294–7, Sep. 2006Google Scholar

Choi, J.-Y., Ruan, J., Coccetti, F. and Lucyszyn, S., “Three-dimensional RF MEMS switch for power applications”, IEEE Trans. Ind. Electron. vol. 56, no. 4, pp. 1031–9, Apr. 2009CrossRef Google Scholar

Agilent Technologies, “Agilent L series multiport electromechanical coaxial switches”,

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4 - Niche switch technologies

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