2 results
Determination of the energy release rate in the interfacial delamination of silicon nitride film on gallium arsenide substrate via nanoindentation
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- Journal:
- Journal of Materials Research / Volume 29 / Issue 6 / 28 March 2014
- Published online by Cambridge University Press:
- 20 March 2014, pp. 801-810
- Print publication:
- 28 March 2014
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Indentation-induced delamination of plasma-enhanced chemical vapor deposition silicon nitride film on gallium arsenide substrate
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- Journal:
- Journal of Materials Research / Volume 28 / Issue 8 / 28 April 2013
- Published online by Cambridge University Press:
- 27 March 2013, pp. 1047-1055
- Print publication:
- 28 April 2013
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