13 results
A polycrystalline SiC-on-Si architecture for capacitive pressure sensing applications beyond 400 °C: Process development and device performance
-
- Journal:
- Journal of Materials Research / Volume 28 / Issue 1 / 14 January 2013
- Published online by Cambridge University Press:
- 16 August 2012, pp. 120-128
- Print publication:
- 14 January 2013
-
- Article
- Export citation
Mechanically adaptive nanocomposites for neural interfacing
-
- Journal:
- MRS Bulletin / Volume 37 / Issue 6 / June 2012
- Published online by Cambridge University Press:
- 08 June 2012, pp. 581-589
- Print publication:
- June 2012
-
- Article
- Export citation
Fabrication and Characterization of MEMS-Based Structures from a Bio-Inspired, Chemo-Responsive Polymer Nanocomposite
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1299 / 2011
- Published online by Cambridge University Press:
- 20 January 2011, mrsf10-1299-s04-07
- Print publication:
- 2011
-
- Article
- Export citation
PECVD Silicon Carbide as a Thin Film Packaging Material for Microfabricated Neural Electrodes
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1009 / 2007
- Published online by Cambridge University Press:
- 15 March 2011, 1009-U04-03
- Print publication:
- 2007
-
- Article
- Export citation
Fabrication and Characterization of Flexible, Microfabricated Neural Electrode Arrays Made from Liquid Crystal Polymer and Polynorbornene
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 926 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0926-CC06-04
- Print publication:
- 2006
-
- Article
- Export citation
Development of PECVD SiC for MEMS Using 3MS as the Precursor
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 911 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0911-B05-28
- Print publication:
- 2006
-
- Article
- Export citation
Mechanical Properties and Morphology of Polycrystalline 3C-SiC Films Deposited on Si and SiO2 by LPCVD
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 795 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, U11.3
- Print publication:
- 2003
-
- Article
- Export citation
Surface Micromachining: A Brief Introduction
-
- Journal:
- MRS Bulletin / Volume 26 / Issue 4 / April 2001
- Published online by Cambridge University Press:
- 31 January 2011, pp. 289-290
- Print publication:
- April 2001
-
- Article
- Export citation
A Novel Method of Fabricating SiC-On-Insulator Substrates for Use in MEMS
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 681 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, I5.16
- Print publication:
- 2001
-
- Article
- Export citation
Micromachining Techniques for Advanced SiC MEMS
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 640 / 2000
- Published online by Cambridge University Press:
- 21 March 2011, H4.3
- Print publication:
- 2000
-
- Article
- Export citation
Characterization of polycrystalline silicon carbide films grown by atmospheric pressure chemical vapor deposition on polycrystalline silicon
-
- Journal:
- Journal of Materials Research / Volume 13 / Issue 2 / February 1998
- Published online by Cambridge University Press:
- 31 January 2011, pp. 406-412
- Print publication:
- February 1998
-
- Article
- Export citation
Finite-Element Modeling of Residual Stress in SiC Diaphragms
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 518 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 221
- Print publication:
- 1998
-
- Article
- Export citation
Synthesis and Characterization of Nitrogen Containing Diamondlike Carbon Films made by ion Beam Deposition
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 349 / 1994
- Published online by Cambridge University Press:
- 22 February 2011, 465
- Print publication:
- 1994
-
- Article
- Export citation