Symposium B – In-Situ Patterning: Selective Area Deposition and Etching
Research Article
Characterization of Sidewall Residue Film and Atomic Structure of the Trench Formed by BCI3/CI2 Reactive Ion Etching
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- 21 February 2011, 431
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Generation of Blind Via-Holes for a High Density Multi-Chip-Module Using Excimer Lasers
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- Published online by Cambridge University Press:
- 21 February 2011, 439
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Laser Deposition and Patterning of High-Temperature Superconductors
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- Published online by Cambridge University Press:
- 21 February 2011, 451
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Precursors to the Photo-Ablation of Sodium Trisilicate Glass Due to Uv Excimer Irradiation
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- 21 February 2011, 463
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Ultrafast Imaging of Ultraviolet Laser Ablation and Etching of Polymethyl Methacrylate
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- 21 February 2011, 471
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Low Temperature Laser Physical Vapor Deposition of Multilayered Thin Films
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- Published online by Cambridge University Press:
- 21 February 2011, 477
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Laser Patterning and Electrical Properties of Submicron Lines of Y-Ba-Cu-O
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- Published online by Cambridge University Press:
- 21 February 2011, 485
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