Symposium J – Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines
Research Article
Surface Oxide Effects on Static Fatigue of Polysilicon MEMS
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- Published online by Cambridge University Press:
- 11 February 2011, J3.4
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Aluminum Nitride Chip Carrier for Micro-electro-mechanical Sensor Applications
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- Published online by Cambridge University Press:
- 11 February 2011, J5.18
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Selective Titanium Oxide Formation Using Electron-beam Induced Carbon Deposition Technique
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- Published online by Cambridge University Press:
- 11 February 2011, J4.5
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