A calibration procedure for the detection efficiency of energy
dispersive X-ray spectrometers (EDS) used in combination with scanning
electron microscopy (SEM) for standardless electron probe microanalysis
(EPMA) is presented. The procedure is based on the comparison of X-ray
spectra from a reference material (RM) measured with the EDS to be
calibrated and a reference EDS. The RM is certified by the line
intensities in the X-ray spectrum recorded with a reference EDS and by its
composition. The calibration of the reference EDS is performed using
synchrotron radiation at the radiometry laboratory of the
Physikalisch-Technische Bundesanstalt. Measurement of RM spectra and
comparison of the specified line intensities enables a rapid efficiency
calibration on most SEMs. The article reports on studies to prepare such a
RM and on EDS calibration and proposes a methodology that could be
implemented in current spectrometer software to enable the calibration
with a minimum of operator assistance.