Interaction of extreme ultraviolet (EUV) pulses of high intensity with gases results in the creation of non-thermalized plasmas. Energies of the driving photons and photoelectrons are sufficient for creation of excited states, followed by emission of the EUV photons. In most cases, decay times of these states are short comparing to the driving EUV pulse. It means that just after stopping of the driving pulse, the EUV emission corresponding to the excited states should also stop. From our earlier measurements in the optical range, however, it can be concluded that lifetimes of such plasmas exceed a time duration of the driving pulse even two orders of magnitude. Hence, it can be expected that the time duration of the EUV emission can be also significantly longer than the irradiation time. In this work, EUV-induced, low-temperature helium (He), krypton, and xenon plasmas were investigated. EUV emission from these plasmas was studied, using a specially prepared detection system, allowing for time-resolved measurements, in selected spectral ranges. The detection system was based on a paraboloidal collector and a semiconductor photodiode, sensitive for the EUV photons. For spectral selection, the corresponding filters or multilayer mirrors were employed. In most cases, the time duration of the EUV emission was significantly longer than the driving EUV pulse. In case of He plasmas, the emission corresponding to excited atoms was detected even hundreds of nanoseconds after the irradiation. It was also shown that the corresponding time profiles depended on densities of gases to be ionized.

Irradiation of gases with intense pulses of extreme ultraviolet (EUV) can result in the formation of low-temperature plasmas. During the time of irradiation, various non-thermal processes driven by the EUV photons and photoelectrons take place, leading to the creation of excited states of atoms and ions. Fast relaxation of these states should result in EUV emission within a time comparable to the driving EUV pulse. On the other hand, from our earlier works, a time duration of the emission in an optical range is over an order of magnitude longer. It can be thus expected that the time of EUV emission can be also relatively long. In this work, time-resolved measurements of the EUV emission from low-temperature plasmas induced in He, Ne, and Ar gases were performed. Due to a low intensity of the emitted radiation, a specially prepared detection system, based on an EUV collector and an EUV sensitive photodiode, was employed. In all cases, a time duration of the EUV emission was much longer compared with the driving EUV pulse. Time profiles of the corresponding signals were specific for particular gases. In case of He and Ne plasmas, these time profiles varied with initial densities of gases to be ionized. The corresponding dependence was especially visible in case of plasmas induced in helium. In case of Ar plasmas, such dependence was not revealed.

In this work, extreme ultraviolet (EUV) emission, from EUV induced, low-temperature microplasmas, were investigated. To perform temporal measurements of the EUV pulses of low intensity, in a medium vacuum, under the pressure of the order of 0.1–0.01 mbar a special detection system was prepared. The system was based on an EUV collector and a semiconductor detector, sensitive for the EUV photons. The collector consisted of two identical grazing incidence, paraboloidal mirrors, and allowed to focus a part of the radiation emitted from the microplasma onto the detector surface. An absorption filter, mounted between the collector and the detector, allowed for selection of an interesting wavelength range. Plasmas were created by irradiation of small portions of gases, injected into the vacuum chamber, using a laser produced plasma EUV source. Three gases were used for the EUV induced plasma formation: neon, krypton, and xenon. Low-temperature plasmas, created in these gases, contained multiply charged ions, emitting radiation in similar wavelength ranges. Two detectors, AXUV20HS1 and AXUVHS5, were used for the measurements. It was shown that differences between the corresponding signal profiles, obtained using both detectors, were not very significant. Moreover, it was demonstrated that the duration of the EUV emission from plasmas, created in different gases, were comparable with the duration of the driving EUV pulse. The longest EUV emission was observed for Kr plasmas, approximately 1.5 times the full width half maximum of the driving EUV pulse.