1 results
Insertion effect of the 3-nm-thick Co(Pt) layer on AlN preferred orientation and residual stress in the c-axis textured AlN film
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1515 / 2013
- Published online by Cambridge University Press:
- 19 March 2013, mrsf12-1515-ii13-19
- Print publication:
- 2013
-
- Article
- Export citation