4 results
Temperature Dependence of Rapid Thermal Annealing of Silicon on Sapphire
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- Journal:
- MRS Online Proceedings Library Archive / Volume 107 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 377
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- 1987
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New DSPEG Approach to Improvement of SOS Using Low Dose Self-Implantations
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- Journal:
- MRS Online Proceedings Library Archive / Volume 74 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 615
- Print publication:
- 1986
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Temperature And Dose Dependence of An Amorphous Layer Formed By Ion Implantation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 51 / 1985
- Published online by Cambridge University Press:
- 26 February 2011, 375
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- 1985
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New Developments in the Defect Structure of Implanted Furnace-Annealed Silicon on Sapphire
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- Journal:
- MRS Online Proceedings Library Archive / Volume 10 / 1981
- Published online by Cambridge University Press:
- 15 February 2011, 357
- Print publication:
- 1981
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