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Ion-Beam-Induced Damaging and Dynamic Annealing Processes in Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 27 / 1983
- Published online by Cambridge University Press:
- 25 February 2011, 247
- Print publication:
- 1983
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- Article
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The Production of Porous Structures on Si, Ge and GaAs by High Dose Ion Implantation.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 27 / 1983
- Published online by Cambridge University Press:
- 25 February 2011, 205
- Print publication:
- 1983
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- Article
- Export citation