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Growth of Polycrystalline Silicon Carbide on Thin Polysilicon Sacrificial Layers for Surface Micromachining Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 741 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, J4.3
- Print publication:
- 2002
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Review of Pendeo-Epitaxial Growth and Characterization of Thin Films of GaN and AlGaN Alloys on 6H-SiC(0001) and Si(111) Substrates
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- Journal:
- Materials Research Society Internet Journal of Nitride Semiconductor Research / Volume 6 / 2001
- Published online by Cambridge University Press:
- 13 June 2014, e14
- Print publication:
- 2001
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Process Routes for Low Defect-Density GaN on Various Substrates Employing Pendeo-Epitaxial Growth Techniques
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- Journal:
- Materials Research Society Internet Journal of Nitride Semiconductor Research / Volume 4 / Issue S1 / 1999
- Published online by Cambridge University Press:
- 13 June 2014, pp. 477-483
- Print publication:
- 1999
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Process Routes for Low Defect-Density GaN on Various Substrates Employing Pendeo-Epitaxial Growth Techniques
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- Journal:
- MRS Online Proceedings Library Archive / Volume 537 / 1998
- Published online by Cambridge University Press:
- 15 February 2011, G4.9
- Print publication:
- 1998
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