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Investigating GaSb(001) Dry Etching by ICP-RIE on a non-Silicon Containing Sample Holder with no Organic Gases
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1396 / 2012
- Published online by Cambridge University Press:
- 18 April 2012, mrsf11-1396-o07-33
- Print publication:
- 2012
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- Article
- Export citation