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Performance Improvements of Local Electrodes from In-situ Plasma Cleaning

Published online by Cambridge University Press:  26 July 2009

R Ulfig ,
S Gerstl  and
TJ Prosa
R Ulfig
Affiliation:
Imago Scientific Instruments Corp
S Gerstl
Affiliation:
Imago Scientific Instruments Corp
TJ Prosa
Affiliation:
Imago Scientific Instruments Corp

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 286 - 287
Copyright
Copyright © Microscopy Society of America 2009