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Development of an Aberration Corrected 1.2-MV Field Emission Transmission Electron Microscope

Published online by Cambridge University Press:  23 September 2015

Hiroyuki Shinada ,
Toshiaki Tanigaki ,
Tetsuya Akashi ,
Yoshio Takahashi ,
Tadao Furutsu ,
Tomokazu Shimakura ,
Takeshi Kawasaki ,
Keigo Kasuya ,
Heiko Muller  and
Maximilian Haider
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Hiroyuki Shinada
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Toshiaki Tanigaki
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Tetsuya Akashi
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Yoshio Takahashi
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Tadao Furutsu
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Tomokazu Shimakura
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Takeshi Kawasaki
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Keigo Kasuya
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Heiko Muller
Affiliation:
Corrected Electron Optical Systems GmbH, Englerstr. 28, D-69126, Heidelberg, Germany
Maximilian Haider
Affiliation:
Corrected Electron Optical Systems GmbH, Englerstr. 28, D-69126, Heidelberg, Germany
Nobuyuki Osakabe
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Akira Tonomura
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan RIKEN Center for Emergent Matter Science (CEMS), Wako 351-0198, Japan

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1597 - 1598
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Tonomura, A., et al, Jpn. J. Appl. Phys 18, 9 (1979).CrossRefGoogle Scholar
[2] Sepehri-Amin, H., et al, Acta Mater 61, 6622 (2013).CrossRefGoogle Scholar
[3] Haider, M., et al, Nature 392, 768 (1998).CrossRefGoogle Scholar
[4] Kasuya, K., et al, J. Vac. Sci. Technol. B 32, 031802 (2014).CrossRefGoogle Scholar
[5] This research was supported by a grant from the Japan Society for the Promotion of Science (JSPS) through the Funding Program for World-Leading Innovative R&D on Science and Technology (FIRST Program),’ initiated by the Council for Science and Technology Policy (CSTP).Google Scholar