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Characterization of Nanoscale Structures Using a Combination of an Ultra-High Resolution Field Emission SEM and Large Area Silicon Drift Detector.

Published online by Cambridge University Press:  26 July 2009

N Rowlands ,
N Erdman  and
V Robertson
N Rowlands
Affiliation:
Oxford Instruments
N Erdman
Affiliation:
JEOL,USA Inc
V Robertson
Affiliation:
JEOL,USA Inc

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 548 - 549
Copyright
Copyright © Microscopy Society of America 2009