The Application of Low Energy Scanning-Transmission Electron Microscopy (LVSTEM) to the Study of Semiconductor Materials and Devices

Bryan Tracy

doi:10.1017/S1431927603441275

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The Application of Low Energy Scanning-Transmission Electron Microscopy (LVSTEM) to the Study of Semiconductor Materials and Devices

Published online by Cambridge University Press: 21 July 2003

Bryan Tracy

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Bryan Tracy*: Affiliation:
Advanced Micro Devices, Sunnyvale, Ca, 94088

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Type: Abstract
Information: Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 20 - 21

DOI: https://doi.org/10.1017/S1431927603441275 [Opens in a new window]
Copyright: Copyright © Microscopy Society of America 2003

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The Application of Low Energy Scanning-Transmission Electron Microscopy (LVSTEM) to the Study of Semiconductor Materials and Devices

Volume 9, Issue S02
Bryan Tracy ^(a1)
DOI: https://doi.org/10.1017/S1431927603441275

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The Application of Low Energy Scanning-Transmission Electron Microscopy (LVSTEM) to the Study of Semiconductor Materials and Devices

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