2 results
Transformation of optical properties of Si-rich Al2O3 films at thermal annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1617 / 2013
- Published online by Cambridge University Press:
- 19 November 2013, pp. 81-84
- Print publication:
- 2013
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- Article
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The Thermal Annealing Effect On The Residual Stress And Interface Adhesion In The Compressive Stressed DLC Film.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 795 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, U11.42
- Print publication:
- 2003
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- Article
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