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Selenium Segregation in Femtosecond-Laser Hyperdoped Silicon Revealed by Electron Tomography
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- Journal:
- Microscopy and Microanalysis / Volume 19 / Issue 3 / June 2013
- Published online by Cambridge University Press:
- 10 April 2013, pp. 716-725
- Print publication:
- June 2013
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- Article
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