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A Demodulation Algorithm for Periodically In-Plane Vibrating MEMS Based on a Stroboscopic Micro-Visual System
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- Journal:
- Microscopy and Microanalysis / Volume 28 / Issue 1 / February 2022
- Published online by Cambridge University Press:
- 16 December 2021, pp. 145-151
- Print publication:
- February 2022
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