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1 results

  • Nondestructive Angle-resolved X-ray Depth Profiling: Interpretation of Angle-resolved Profiles Using a Monte Carlo Approach

  • David K. Wilkinson, Daniel A. Loveday, Martin Prutton
  • Journal:
    Microscopy and Microanalysis / Volume 6 / Issue 6 / November 2000
    Published online by Cambridge University Press:
    07 August 2002, pp. 517-531
    Print publication:
    November 2000

  • A technique has been developed for the interpretation of composition-depth profiles from angleresolved X-ray data using a Monte Carlo electron scattering simulation. This is a nondestructive depth profiling procedure. Software has been developed that uses a Monte Carlo scattering simulation to generate the signal intensity from a multilayer sample for any combination of primary beam angle of incidence and take-off angle to the X-ray detector. An interactive C++ application uses this simulation to interpret measured angle-resolved depth profiles. The method has been tested using a custom-made Ag/Al “staircase” sample containing two layers each of Ag and Al. Using the technique, it is possible to quantify the composition-depth profile for the two- and three-layer “steps” of the sample. Qualitative information may be gained about the four-layer area of the sample.