Measuring the changing thickness of a thin film, without a
reference, using an atomic force microscope (AFM) is problematic.
Here, we report a method for measuring film thickness based
on in situ monitoring of surface roughness of films as
their thickness changes. For example, in situ AFM
roughness measurements have been performed on alloy film electrodes
on rigid substrates as they react with lithium electrochemically.
The addition (or removal) of lithium to (or from) the alloy
causes the latter to expand (or contract) reversibly in the
direction perpendicular to the substrate and, in principle,
the change in the overall height of these materials is directly
proportional to the change in roughness. If the substrate on
which the film is deposited is not perfectly smooth, a correction
to the direct proportionality is needed and this is also discussed.