Quantitative zone-axis convergent beam electron diffraction (CBED) is
now an established technique. Over the past decade it has been
developed into a tested method for the accurate refinement of structure
factors, allowing the details of the charge density and bonding effects
to be studied in crystalline materials. Strategies for obtaining the
most accurate results have evolved, and the most important influences
on the accuracy have been determined. Initial applications of the
technique to bond charge density determination have led to the
extension of the method to the refinement of other important parameters
influencing the experimental data, such as Debye–Waller factors
and the absorption potential. The development and current status of
quantitative zone-axis CBED are discussed. Prospects for the future
development and application of the technique are also considered.