The interaction of Xe (λ ∼ 1.73 μm) and XeCl (0.308
μm) laser radiation with surfaces of metal and TiN-ceramic
coatings on glass and steel substrates has been studied.
Correlation between parameters of surface erosion versus
laser-specific energy was investigated. Monitoring of laser-induced
erosion on smooth polished surfaces was performed using optical
microscopy. The correlation has been revealed between
characteristic zones of thin coatings damaged by irradiation
and energy distribution over the laser beam cross section allowing
evaluation of defects and adhesion of coatings. The interaction
of pulsed periodical CO2 (λ ∼ 10.6 μm),
and Xe (λ ∼ 1.73 μm) laser radiation with surfaces
of teflon (polytetrafluoroethylene—PTFE) has been studied.
Monitoring of erosion track on surfaces was performed through
optical microscopy. It has been shown that at pulsed periodical
CO2-radiation interaction with teflon the sputtering
of polymer with formation of submicron-size particles occurs.
Dependencies of particle sizes, form, and sputtering velocity
on laser pulse duration and target temperature have been obtained.