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Electron Energy Loss Spectroscopy Characterization of TANOS (TaN/Al2O3/Si3N4/SiO2/Si) Stacks
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- Journal:
- Microscopy and Microanalysis / Volume 19 / Issue S5 / August 2013
- Published online by Cambridge University Press:
- 06 August 2013, pp. 109-113
- Print publication:
- August 2013
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- Article
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