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1 results

  • Capacitive and ohmic RF NEMS switches based on vertical carbon nanotubes

  • A. Ziaei, M. Charles, M. Le Baillif, S. Xavier, A. Caillard, C.S. Cojocaru
  • Journal:
    International Journal of Microwave and Wireless Technologies / Volume 2 / Issue 5 / October 2010
    Published online by Cambridge University Press:
    07 December 2010, pp. 433-440

  • The objective is to demonstrate a reproducible carbon nanotube (CNT)-based technology for radio frequency (RF) switch working in the range of 40–60 GHz and fulfilling the specifications: low losses, high isolation, and an operating voltage below 30 V. The first processed component had an operating voltage of 14 V for an ohmic contact in a Nano-Electro Mechanical System (NEMS) tweezer design. This result is confirmed by theory with an operating voltage of 13 V. A capacitive-contact NEMS is also developed using multi-walled CNTs (MWCNTs) coated with a SiO2 dielectric layer deposited by electron beam induced deposition method (EBID). High Frequency Simulation Software (HFSS) RF-simulation on an innovative NEMS geometry shows encouraging results with transmission ratios between “on” state and “off” state up to 34% for ohmic-contact switch and 25% for a capacitive-contact switch.