Investigations into the morphology and structural evolvement of nanomaterials are essential for understanding the growth process. Herein, we present meaningful results on crystallinity transformation of β-SiC nanorods at different preparation temperatures using X-ray diffraction. Results of the characterization indicated that both crystallinity and yield of the as-prepared β-SiC nanostructures were enhanced with increasing reaction temperature. Scanning electron microscope and high-resolution transmission electron microscope were further employed to understand detailed structural information of the SiC nanorods obtained at specific temperature. The results may shed light on structural evolvement for fabrication of nanomaterials.